SBIR Phase II: SWARS IR Camera

这个小型企业创新研究二期(SBIR)项目将开发一种微型制造的亚波长抗反射结构(SAWS)，与MEMS红外探测器一起使用，以形成红外相机。SWARS结构在第一阶段中进行了原型制作，并显示允许红外光谱8-12？m部分中90%以上的入射辐射通过，因此比目前执行这一功能的标准减反射(AR)多层涂层性能更好。这些AR涂层是出了名的不可靠，因为在IR设备的加工和封装过程中，厚膜往往会剥离。在这个第二阶段的项目中，Swars的设备将与热光阀(TLV)相匹配，以制造红外相机。如果成功，建议的方法可用于生产用于广泛红外应用的MEMS器件，包括气体传感器、红外信标和红外测温仪。由于其优越的传输性能和设计对温度波动的稳健性，SWARS结构将用于必须在广泛的温度范围内运行并几乎承受任何运行或加工温度的设备。这些应用包括用于工厂车间检查、电网监控、海上导航和安全监控的设备，以及消防和第一反应。

This Small Business Innovation Research Phase II (SBIR) project will develop a microfabricated subwavelength antireflective structure (SWARS) for use with a MEMS infrared detector to form and infrared camera. The SWARS structure was prototyped in Phase I and shown to allow greater than 90% of incident radiation in the 8-12 ìm portion of the IR spectrum to pass, thus performing better than standard antireflective (AR) multilayer coatings which presently perform this function. These AR coatings are notoriously unreliable, as the thick films tend to delaminate during the processing and packaging of the IR device. In this Phase II project, the SWARS devices will be mated with a thermal light valve (TLV) to make the IR camera. If successful the proposed approach may be used to produce MEMS devices for a broad range of IR applications, including gas sensors, IR beacons and IR thermographers. Because of their superior transmission properties and the robustness of the design to temperature fluctuations SWARS structures will be used in devices which must operate over a wide range of temperatures, and withstand virtually any operating or processing temperature. Such applications include equipment for factory floor inspections, power grid monitoring, maritime navigation, and security monitoring, in addition to fire fighting and first response.