Collaborative Research: Heterogeneous Integration of Patterned 3-D Nanotube Supercapacitators on CMOS

摘要这个跨学科的研究项目旨在证明碳纳米管超级电容器在互补金属氧化物硅集成电路上的异质集成作为可靠的片上能源的新概念。本论文将探讨图案化碳纳米管超级电容器在互补金属氧化物硅积体电路上之设计、制作与异质整合之基础研究与关键问题。图案化的碳纳米管薄膜将使用模板引导增强介电泳技术组装，该技术与传统的互补金属氧化物硅技术兼容。所制造的纳米管膜将用于构建超级电容器，其具有作为片上电源的多方向功率流能力。这项合作将导致集成超级电容器作为独立的片上电源的发展。它将为非常大规模的集成系统提供一个即时的变革性解决方案，大大降低了尺寸和成本。它将提高系统的可靠性和运行时间，并刺激各种各样的新应用，从植入式设备，远程医疗保健到智能建筑和无处不在的计算和传感。一个并行和综合教育计划的目的是培养学生在行业一样的环境，并提高他们的解决问题的技术和团队合作能力。教育方面的努力包括招聘和留住工程教育的学生研究人员，加强两个研究机构（特拉华州大学和亚利桑那大学）的工程课程，在社会上更广泛的教育，并推广到代表性不足的群体的成员。它强调了工程教育的多样性，将产生巨大的社会效益。

Abstract This cross-disciplinary research project aims at demonstrating a proof of new concept on heterogeneous integration of carbon nanotube supercapacitors on complementary metal-oxide-silicon integrated circuits as reliable on-chip energy sources. Fundamental studies and key issues on design, fabrication and heterogeneous integration of patterned carbon nanotube supercapacitors on the complementary metal-oxide-silicon integrated circuits will be investigated. Patterned carbon nanotube films will be assembled using a template-guide enhanced dielectrophoretic technique which is compatible to the traditional complementary metal-oxide-silicon technology. The fabricated nanotube films will be utilized to construct supercapacitors, which have multi-directional power flow capability as on-chip power sources. The collaborative effort will result in the development of integrated supercapacitors as independent, on-chip, power sources. It will provide an immediate transformative solution to very large scale integrated systems with the significant reduction on size and cost. It will improve system reliability and run-time and stimulate a large variety of new applications ranging from implantable devices, remote healthcare to smart buildings and ubiquitous computing and sensing. A concurrent and integrated educational program is designed to train students in industry-like environments and to enhance their problem-solving techniques and team-work skills. The educational efforts include recruitment and retention of student researchers in engineering education, enhancement of the engineering curriculum at the two research institutions (University of Delaware and University of Arizona), broader education in the society, and outreach to members of underrepresented groups. Moreover, it emphasizes diversity in engineering education and will result in tremendous social benefits.