SBIR Phase II: Deep UV LED with High Quality p-AlInGaN Layers by Digital Doping Control

这个小企业创新研究二期项目将通过迁移增强金属有机化学气相沉积（MEMOCVD）技术，开发并商业化高质量p型掺杂AlInGaN层的下一代高功率深紫外发光二极管（DUV led）。在240 nm到365 nm的光谱范围内工作的DUV led对于医疗，生物分析，传感和国土安全技术非常重要。该项目旨在通过改进材料质量、掺杂和器件设计来提高LED的效率和寿命。这些改进将为大规模渗透全球卫生和消毒等高容量市场奠定基础。该二期项目将通过使用高质量的MEMOCVD掺杂p-AlInGaN顶部接触层，在透明外延结构中实现高效的多通道萃取。实现高掺杂p-AlInGaN层质量的提高，将允许创建低成本，高功率半导体DUV辐射源，其壁塞效率超过5%，工作寿命超过5000小时。该项目的更广泛的影响/商业潜力将源于DUV led在现有市场的市场渗透，这些市场需要紧凑和环保的紫外线辐射源。该项目还将允许渗透到以前由于现有紫外线灯或激光器的固有限制而无法实现的新应用中。这些设备的主要市场包括生物医学和分析仪器、荧光传感、油墨固化、光疗和水/空气消毒。这种制造高效率和长寿命DUV设备的新技术将使这些半导体光源具有与成熟的UV灯技术竞争的价格点。这将允许在各种应用中更多地使用环保，无汞的紫外线技术，这将导致减少有毒废物和与汞灯处理相关的成本。这些新型DUV LED光源的净化、灭菌和早期预警应用也将提高生活质量，特别是在发展中国家。

This Small Business Innovation Research Phase II project will develop and commercialize next-generation high-power deep ultraviolet light emitting diodes (DUV LEDs) with high quality p-type doped AlInGaN layers via migration-enhanced metal-organic chemical vapor deposition (MEMOCVD). DUV LEDs operating in the spectral region from 240 nm to 365 nm are of great importance for medical, bio-analytical, sensing, and homeland security technologies. This project aims to improve the LED efficiency and lifetime by improvements in the material quality, doping, and device design. These enhancements will lay the groundwork for large-scale penetration of high volume markets, such as global sanitation and disinfection. This Phase II project will achieve efficient multiple pass extraction in transparent epitaxial structures through use of high-quality MEMOCVD doped p-AlInGaN top contact layers. Achieving an improved quality of highly doped p-AlInGaN layers will allow creation of a low-cost, high power semiconductor DUV radiation source with wall plug efficiency exceeding 5% and operation lifetimes longer than 5,000 hours. The broader impact/commercial potential of this project will originate from the market penetration of DUV LEDs into existing markets that require compact and environmentally friendly UV radiation sources. This project will also allow penetration into new applications that were previously unattainable due to the inherent limitations of existing UV lamps or lasers. The primary markets for these devices include bio-medical and analytical instrumentation, fluorescence sensing, ink curing, phototherapy and water/air disinfection. This new technology for manufacturing high-efficiency and long-lifetime DUV devices will allow these semiconductor light sources to have a price point which is competitive with the mature UV lamp technology. This will allow the increased use of an environmentally friendly, mercury-free UV technology for a variety of applications, which will result in a reduction of toxic waste and in the costs associated with mercury lamp disposal. The purification, sterilization, and early warning applications enabled by these new DUV LED sources will also result in an improved quality of life, particularly in the developing world.