EAGER: Piezoelectric Energy Scavenging Schemes for Hybrid Integrated Systems

EIGER：用于混合集成系统的压电能量清除方案目的：该方案的目标是设计和制造一种用于气体和/或液体环境中的传感的集成封装器件。智能优点：探索性的方法是关注具有不同热膨胀系数的双晶梁，用锆钛酸铅(PZT)进行实验，并在微型机电系统(MEMS)型器件上进行演示。PZT作为一种单层压电材料，当输出电压驱动低功率电子器件时，可以在能量收集应用中进行优化。首先，它可以通过缓解压力来产生可再生能源。此外，通过改变PZT中的Zr/Ti组分，PZT具有温度敏感性，并可用于热释电传感器，从而可以开发出随温度变化的小电压，并能够驱动后处理电子设备。挑战在于这种电压摆动的局限性，最佳组合的材料识别，以及最小化驱动电子设备。所制作的器件结构将用于能量采集，并成为适用于MEMS器件的材料的重要性能，成功完成将使基于MEMS的子系统的整体灵敏度得到提高。通过协调压电效应和热释电效应，这里描述的方法可以提供包括生物传感在内的许多应用。最终，具有此次调查样本的机械特性的电学测量将为建立集成设备的模型提供一个平台。广泛的影响：首席调查员将把这一研究主题纳入？每个人将指导一个教育计划，该计划包括研究生在学年作为专家课堂访客，以及在夏季为年轻学者和高中教师提供指导，该计划是她与北卡罗来纳州立大学的NC科学之家合作开发的。调查员的特别努力旨在增加妇女和任职人数不足的学生在科学和工程领域的参与。

EAGER: Piezoelectric Energy Scavenging Schemes for Hybrid Integrated SystemsObjective: The objective of this proposal is to design and fabricate an integrated encapsulated device for sensing in gaseous and/or liquid environments applications.Intellectual Merit: The exploratory approach is to focus on bimorphic beams with different thermal expansion coefficients, experiment with lead zirconate titanate (PZT), and demonstration on a micro electromechanical systems (MEMS) type device. PZT used as a single layer piezoelectric material can be optimized in energy harvesting applications when the output voltage drives low power electronics. Primarily it can be implemented for generating renewable energy by stress relief. In addition by changing the Zr/Ti composition in PZT it can be temperature sensitive and in turn be used in pyroelectric sensors.Thereby these devices can develop a small voltage with temperature change and able to drive post processing electronics. The challenges consist on the limitations of this voltage swing, identification of the materials for the optimum combination, and to minimize the driving electronics. The fabricated device structure will be used for energy harvesting and into important properties of materials suitable for MEMS devices.Successful completion will permit the overall sensitivity of the MEMS-based subsystem to improve. By coordinating both piezo and pyroelectric effects, the approach described here could offer many applications including bio-sensing. Eventually it is expected that the electrical measurements with themechanical properties of the samples from this investigation will provide a platform for modeling the integrated device.Broader Impact: The principal investigator will incorporate this research topic within the ?Each One Mentor one education program involving graduate students as Expert Classroom Visitors during the academic year and mentors during the summer for young scholars and high school teachers that she hasdeveloped in collaboration with the NC Science House at NC State University. The investigator special efforts are targeted to increase the participation of women and underrepresented students in the science and engineering fields.