MRI: Acquisition of Electron-Beam Lithography for Nanofabrication in the North Texas Region

研究目标和方法：本研究的目的是使整个北德克萨斯州地区的最高水平的纳米级研究。 该方法是获得Raith e-LiNE Plus电子束光刻（EBL）工具。它将被放置在UTD洁净室研究实验室（CRL），以提供先进的光刻能力。 在德克萨斯州北部没有EBL能力来促进大学和公司的研究。智力优势：EBL工具将加速现有的研究，并在一系列令人惊讶的领域中开辟新的研究途径。增强的示例领域包括：纳米电子器件，传感器，制造，材料和光子学。 许多研究人员将通过EBL工具与CRL中已有的功能相结合来实现。CRL拥有庞大且不断增长的用户群（210），并有能力使EBL工具长期高效。 UTD的教职员工，以及整个北德克萨斯州的同事有资金和专业知识，使最大限度地利用这一能力。更广泛的影响：收购EBL将加强广泛的活动，人员，研究领域和机构。它将加强CRL的研究和教育，包括多个学科的各种课程，包括研究生和本科生（对UTD至关重要？的教学使命）。此外，它将通过暑期研究方案加强对高中生的培训。所有纳米级研究都可以得到加强，并将促进新的工业合作。 它将使许多主要大学和公司的研究人员在整个北德克萨斯州和超越。

Research Objectives and Approaches: The objective of this research is to enable the highest level nanoscale research within the entire north Texas region. The approach is to acquire a Raith e-LiNE Plus E-Beam Lithography (EBL) tool. It will be placed in the UTD Cleanroom Research Laboratory (CRL) to provide advanced lithographic capabilities. There is no EBL capability in north Texas to facilitate university and corporate research. Intellectual Merit: This EBL tool will accelerate existing research and enable new research avenues in an astonishing array of fields. Example areas enhanced include: Nanoscale Electronic Devices, Sensors, Manufacturing, Materials, and Photonics. Many researchers will be enabled by this EBL tool combined with the capabilities already resident in the CRL. The CRL has a large and growing user base (210) and the capability to make this EBL tool productive in the long term. UTD faculty and staff, together with colleagues throughout north Texas have the funding and expertise to make the most of this capability. Broader Impacts: The EBL acquisition will enhance a broad range of activities, people, research areas, and institutions. It will enhance research and education in the CRL including a variety of classes in multiple disciplines, both graduate and undergraduate (crucial to UTD?s teaching mission). In addition, it will enhance the training of high school students through summer research programs. All nanoscale research can be enhanced and it will foster new industrial collaborations. It will enable the researchers of numerous major universities and companies throughout north Texas and beyond.