MRI: Acquisition of Electron Beam Evaporation System for Multidisciplinary Research and Education

这项研究的目的是为微纳电子学、生物工程和物理学领域的多学科研究和教育提供实质性的微/纳米级功能器件的制造。方法是在乔治梅森大学(GMU)的共享访问设施(GMU)内获得电子束蒸发系统，以沉积厚度为纳米精度的薄膜和多层金属、半导体和氧化物材料。智能优势：所要求的系统将增强沉积薄膜材料以形成电极、绝缘体、半导体沟道和纳米结构的能力，使大学和当地行业研究人员能够在包括纳米电子、能源和生物医学设备在内的广泛应用方面进行合作。所要求的仪器将使高性能纳米线MOSFET、生物传感器、共生表面、有机太阳能电池、拓扑绝缘材料和纳米场效应二极管的研究成为可能。使能的研究将处理物理、电子、生物和化学等广泛学科的基本问题和问题，并最终促进这些群体之间的异花授粉，导致新的研究脉络。更广泛的影响：由所请求的系统使能的研究将对未来健康技术、纳米电子学和太阳能转换设备的发展产生重大影响。GMU、其他大学、国家实验室和工业伙伴的大量学生、博士后和教职员工将可获得所要求的仪器，而这些伙伴中有很大比例的少数族裔和妇女代表不足。使用最先进设备的实践经验使学生和博士后为进入劳动力大军做好准备，准备从事研究、开发和制造。

The objective of this research is to materially strengthen the fabrication of micro/nanoscale functional devices for the multidisciplinary research and education within the areas of micro/nanoelectronics, bioengineering and physics. The approach is to acquire an electron beam evaporation system within the Shared-Access Facility at George Mason University (GMU) to deposit thin films and multilayers of metal, semiconductor and oxide materials with thickness at nanometer precision. Intellectual merit: The requested system will enhance the capability of depositing thin film materials to form electrodes, insulator, semiconductor channels and nanostructures, allowing collaboration among university and local industry researchers for a wide variety of applications including nanoelectronics, energy and biomedical devices. The requested instrument will enable research into high-performance nanowire MOSFETs, biosensors, symbiotic surfaces, organic solar cells, topological insulator materials and nanoscale field effect diodes. The enabled research will deal with fundamental questions and issues in a wide range of disciplines in physics, electronics, biology and chemistry, and will ultimately facilitate cross pollination between these groups leading to new veins of research.Broader impacts: The research enabled by the requested system will have significant impact in the development of future health technology, nanoelectronics and solar energy conversion devices. The requested instrument will be available to a large number of students, post-docs and faculty in GMU, other universities, national labs and industrial partners that involve a large proportion of underrepresented minorities and women. Hands-on experience with state-of-the-art equipment makes students and post-docs well-prepared to enter the workforce ready to engage in research, development and manufacturing.