SBIR Phase I: Monolithic Ceramic Pressure Sensors for High Temperatures

这个小企业创新研究第一阶段项目的目标是开发和商业化能够在大于650°C的温度下工作的压力传感器，用于燃气轮机；航空发动机和内燃机；在油气钻井和地热勘探的下游测量以及其他涉及恶劣操作条件的性能驱动过程控制系统中。在这种环境中，可靠和廉价的微传感器的可用性受到微加工耐火材料（如碳化硅，金刚石或陶瓷）的挑战的阻碍。因此，电流传感器的最高工作温度限制在~650℃。该项目将采用一种新颖的微加工工艺来制造可在850-900°C高温下工作的单片陶瓷压力传感器。该技术还有望支持更宽的动态范围，并具有较低的制造成本。第一阶段的目标包括设计和制造初步原型，演示其高温操作，以及为第二阶段的开发选择设计和包装选项。预期第一阶段的结果包括演示拟议的微观结构、初步性能数据和分析拟议方法的可行性，以可接受的成本满足市场需求。该项目更广泛的影响/商业潜力来自于一系列新产品：用于高温、恶劣环境应用的低成本压力传感器，如内燃机、飞机和工业涡轮机、地热装置、油井和工业过程。拟议中的技术将通过在现有传感器无法实现的条件下提供过程控制，帮助实现“智能引擎”。采用这项技术有望提高可靠性，提高燃油效率，减少发动机和涡轮机的排放，从而降低总体运营成本，提高资源利用率。从长远来看，该项目还将通过开发支持广泛设计和实现新产品的新技术平台，加强对MEMS行业的科学和技术理解。在快速增长的MEMS行业中扩展材料和工艺库将有助于为最终用户提供关键和增值功能。社会影响包括减少污染，提高燃油效率和提高产品可靠性，通过使用拟议的传感器实现智能过程控制。将先进的性能与低制造成本相结合，使该技术能够快速商业化。

This Small Business Innovation Research Phase I project targets development and commercialization of pressure sensors capable of operating at temperatures greater than 650°C for application in gas turbines; aircraft engines and internal combustion engines; in downstream measurements in oil & gas drilling and geo-thermal explorations and in other performance-driven process control systems involving harsh operating conditions. Availability of reliable and inexpensive microsensors for such environments is hindered by the challenge of micromachining refractory materials, such as silicon carbide, diamond or ceramics. As a result, upper operating temperature of the current sensors is limited to ~650°C. This project will employ a novel micromachining process to create monolithic ceramic pressure transducers that can operate at temperatures as high as 850-900°C. The proposed technology is also expected to support a broad dynamic range and have low manufacturing cost. The objectives of Phase I include design and fabrication of preliminary prototypes, demonstration of their high temperature operation, as well as selecting design and packaging options for Phase II development. The expected Phase I results include demonstration of the proposed microstructures, initial performance data and analysis of the feasibility of the proposed approach to meet the market needs at acceptable cost. The broader impact/commercial potential of this project is derived from a new family of products: low-cost pressure sensors for high temperature, harsh environment applications, such as combustion engines, aircraft and industrial turbines, geothermal installations, oil wells and industrial processes. The proposed technology will help enable "intelligent engines" by providing process control in conditions unavailable with existing sensors. Deploying this technology is expected to increase reliability, improve fuel efficiency and reduce the emissions of engines and turbines, resulting in overall reduction of operating cost and better resource utilization. In the long term, the project will also enhance scientific and technological understanding in the MEMS industry by developing a new technology platform that supports a wide range of designs and enables new products. Expanding the materials and process library in the rapidly growing MEMS industry will help deliver critical and value adding functionalities to end users. Societal impacts include reduced pollution, increased fuel efficiency and increased product reliability enabled by intelligent process control using proposed sensors. Combining advanced performance with low manufacturing cost positions this technology for rapid commercialization.