MRI: Development of an Open-Source Dual-Probe Atomic Force Microscope

该主要研究仪器（MRI）奖支持开发开源的双探针原子力显微镜（AFM）。原子力显微镜是纳米科学和纳米技术最通用的工具之一，具有执行各种操作和测量任务的能力。目前最先进的AFMs使用一个探针，要求用户在操作和测量模式之间切换。双探针AFM将利用新开发探针的独特几何形状，将两个探针尖端头对头放置。每个探头和基板将独立驱动，通过同步、局部操作和测量创造前所未有的功能。在操作任务（推、拉、切、挑、定位、定向、组合、扭转等）中，一个探针操作，而另一个探针成像。反馈回路将创造高速、自动化的操作。在光刻任务（划痕，动态犁，氧化，浸笔等）中，类似的安排将通过实时过程调节和控制来创建精确的光刻。在材料表征任务中，样品将由一个探针机械、电、磁或热激发，并由另一个探针测量，在局部激发下产生空间和时间分辨的材料测量。开发的仪器的开源架构也将作为先进控制系统研究的独特实验平台。待制订的文书有可能对广泛的研究和研究训练活动产生广泛的影响。密苏里州材料研究中心（MRC）将向外部用户提供该仪器。除了材料相关的实验外，该仪器还可用于控制系统的研究。模块化代码将在MRC网页上提供，可以修改并提交远程测试。密苏里S&amp；T和MRC承诺对该仪器进行长期维护和保养。该仪器还将用于各种教育活动，包括本科和研究生课程。

This Major Research Instrumentation (MRI) award supports the development of an open-source, dual-probe atomic force microscope (AFM). The AFM is one of the most versatile tools for nanoscience and nanotechnology with the ability to perform a wide variety of manipulation and measurement tasks. Current state-of-the-art AFMs use one probe, requiring the user to switch between manipulation and measurement modes. The dual-probe AFM will exploit the unique geometry of newly developed probes to place two probe tips head-to-head. Each probe and the substrate will be independently actuated creating unprecedented functionality through simultaneous, localized manipulation and measurement. In manipulation tasks (push, pull, cut, pick, position, orient, assemble, twist, etc), one probe will manipulate while the other probe is imaging. A feedback loop will create high-speed, automated manipulation. In lithography tasks (scratch, dynamic plow, oxidation, dip-pen, etc), a similar arrangement will create precision lithography through real-time process regulation and control. In material characterization tasks, the sample will be mechanically, electrically, magnetically, or thermally excited by one probe and measured by the other creating spatially and temporally resolved material measurements under localized excitation. The open-source architecture of the developed instrument will also serve as a unique experimental platform for advanced control systems research.The instrument to be developed has the potential for broad impact in a wide range of research and research training activities. The Missouri S&T Materials Research Center (MRC) will make the instrument available to external users. In addition to materials-related experimentation, the instrument will also be available for control-systems research. Modular code will be provided on the MRC webpage which can be modified and submitted for remote testing. Missouri S&T and the MRC are committed to long-term maintenance and upkeep of this instrument. The instrument will also be used in a variety of educational activities including undergraduate and graduate courses.