WIRELESS ORGANIC CHEMICAL SENSOR (15P07HNWLBauh)

本研究采用化学气相沉积(CVD)技术在新型AlN压电MEMS/NEMS谐振器表面沉积高灵敏的单壁碳纳米管(SWNTs)，形成无电池声传感器无线平台，用于不同气体种类的检测。电路将通过发现装载有碳纳米管的微/纳米谐振器和装饰有喷墨沉积的ss-DNA序列的微/纳米谐振器的共振频率之间的差异来检测特定物种。高度的特异性将产生于挥发性有机分子和谐振器之间的顺序依赖的粘合。几秒钟后，随着环境的变化，有机分子将从DNA上分离，从而实现内置重置。RF接口电子设备将定期向外部询问器报告这些变化。本文提出的由单壁碳纳米管上的单链DNA组合而成的共振式氮化铝(AlN)轮廓型传感器平台，将使最先进的传感器性能提高几个数量级。具体地说，新平台将使以下方面成为可能：(I)错误报警率降低10倍，(Ii)灵敏度提高1000倍(由于极小的共振质量和操作频率，从十亿分之一提高到万亿分之一)，(Iii)小体积检测100个分析物的尺寸减小1000倍，(Iv)节省200倍的电力，(V)更快的响应时间(由于自刷新传感器)，(Vi)显著降低制造成本(由于批量生产)，(Vii)远程操作(谐振器作为RFID标签)和(Viii)几乎零运营费用(得益于传感器的一次性性质)。

For this research project highly sensitive Single wall carbon nano-tubules (SWNTs)are deposited by chemical vapor deposition (CVD) techniques on the surface of novel contour-mode AlN piezoelectric MEMS/NEMS resonators to form batteryless acoustic sensor wireless platforms for the detection of different gas species. A circuit will detect a particular species by finding differences between the resonant frequencies of micro/nanoresonators loaded with carbon nanotubes and decorated with inkjet deposited ss-DNA sequences. A high degree of specificity will result from the sequence dependent adhesion between the volatile organic molecules and the resonators. After a few seconds, the organic molecules will detach from the DNA enabling built-in reset as the environment changes. The RF interface electronics will periodically report these changes to an external interrogator. The resonant aluminum nitride (AlN) contour-mode sensor platform functionalized by combinations of single stranded DNA on single wall carbon nanotubes that is proposed here will permit several orders of magnitude enhancement of state-of-the-art sensor performance. Specifically, the new platform will make possible: (i) 10x reduction in the false alarm rate, (ii) 1,000x improvement in sensitivity (from part per billion to part per trillion thanks to extremely small resonant mass and high frequency of operation), (iii) 1,000x reduction in size for 100 analytes detection in a small volume, (iv) 200x power savings, (v) faster response time ( 5 seconds thanks to self-refreshing sensor), (vi) dramatically reduced fabrication costs (thanks to batch production), (vii) remote operations (resonator as RFID tag) and (viii) almost zero operating expenses (thanks to the disposable nature of the sensor).