STTR Phase I: Multi-sine six-degree of freedom interferometry for precision stage metrology

这个小型企业技术转移第一阶段项目将展示一种新型激光干涉仪，为超精密运动控制设备提供快速和便携的校准。该系统将为客户提供一种便携式系统，与竞争产品相比，该系统执行纳米级校准的时间要短得多。能够提供这种独特功能来测量功能点的系统将降低测量不确定度并缩短校准时间。2011年，仅芯片制造市场就价值3,110亿美元，全球估计有112家封装和芯片生产工厂。根据与一家领先芯片制造商的对话，该行业中的每一家工厂都确认了使用快速便携式工具进行定期校准的必要性。此外，便携式干涉仪在芯片制造之外还有市场机会，范围从大型测量机到精密机器人。这项技术将改变许多行业的游戏规则，促进快速校准时间并将制造生产时间的损失降至最低。许多高精度制造过程需要常规校准，以验证工艺设备是否符合特定的检查和制造规范。目前市场上最先进的便携式干涉仪需要为每个待测量的旋转轴和平移轴设置多个校准设置。更高端的干涉仪产品可以同时测量多个自由度，但价格极其昂贵，不便于携带，而且测量对象较大，导致标定过程中工作台动态发生变化。这项工作介绍了一种新颖的激光校准系统，该系统可以从一个小型便携式模块传输的单一激光光束同时测量所有六个自由度(3个线性和3个旋转)。其目标是在所有三个旋转轴上实现优于100纳米弧度的分辨率，在线性轴上达到1纳米。

This Small Business Technology Transfer Phase I project will demonstrate a novel laser interferometer to provide fast and portable calibrations for ultra-precise motion control devices. This system will provide customers with a portable system that will perform nanometer-level calibrations in a fraction of the time as compared to competitive products. A system that can provide this unique capability to measure a functional point will lower measurement uncertainty and reduce calibration time. The chip manufacturing market alone was $311 billion in 2011 with an estimated 112 plants worldwide in packaging and chip production. Based on dialogue with a leading chip manufacturer, the need for periodic calibration using a fast portable tool has been confirmed for each plant in this industry. Additionally, the portable interferometer has market opportunity beyond chip manufacturing, ranging from large-scale measuring machines to precision robotics. The technology would be a game-changer in many industries to facilitate fast calibration times and minimize loss of manufacturing production time.Many high precision manufacturing processes require routine calibrations to verify that process equipment meets specific inspection and manufacturing specifications. The current state-of-the-art portable interferometers on the market require multiple calibration setups for each rotation and translation axis to be measured. Higher-end interferometer products can measure multiple degrees of freedom at the same time, but are extremely expensive, not portable, and have large measurement targets leading to altered stage dynamics during calibration. This work addresses a novel laser calibration system that can simultaneously measure all six degrees of freedom (3 linear and 3 rotational) from a single laser beam transmitted from a small portable module. The goal is to achieve a resolution of better than 100 nanoradians in all three rotational axes and 1 nanometer in the linear axes.