Instrument Development for Ultrahigh-throughput 3D Chemical Imaging via Glow Discharge Optical Emission Spectroscopy

在化学系化学测量和成像计划的支持下，德克萨斯理工大学的Gamez教授正在开发一种基于测量辉光放电发出的光的超高通量表面元素测绘技术。获得化学信息的空间分辨率对于了解自然系统和提高制造效率(即看到杂质可能在哪里)是重要的。然而，目前的成像技术带来了几个挑战。一方面，许多技术需要几个小时到几十个小时才能获得高分辨率的地表元素图。另一方面，当前更高的样本吞吐量技术可能不会被广泛使用。一些高通量技术需要使用同步辐射设施，这是相对罕见的。伽麦斯教授正在研究一种辉光放电光学光谱技术，这种技术可能会比典型技术快1000倍地绘制元素分布图。因此，目前受分析时间限制限制的成像方案可能成为常规诊断工具。这项研究影响了从材料到生物科学的许多科学研究领域。该项目还为研究生和本科生研究人员提供了在等离子体光学高光谱成像和表面分析方面的仪器开发、基础研究和应用开发方面的培训机会。Gamez教授与许多地方项目合作招收下一代STEM学生，特别是那些来自代表不足的少数群体的学生。辉光放电光学发射光谱(GDOES)最近被证明能够通过在脉冲功率和更高的压力下操作GD来从溅射表面区域内获得空间分辨的横向信息。这些操作模式变得很重要，因为不再需要逐个像素地栅格来获得具有元素分布信息的高光谱数据立方体。这种节省可能会转化为分析时间缩短几个数量级。该项目的总体目标是开发一种基于GDOES的超高通量、3D、大面积表面化学成像技术。这三个目标是：1)开发高光谱成像系统和新型GD仪器，以实现GD 3D化学成像；2)通过OES和激光散射等离子体诊断研究GD的潜在机制；3)开发GDOES 3D化学成像在材料、生物和地质科学中的应用。除了总体目标外，这项研究还可以提高对GD标度的理解，增强对GD条件下分子OES趋势的表征，并使不同领域的各种成像协议成为可能。

With support from the Chemical Measurement and Imaging Program in the Division of Chemistry, Professor Gamez at Texas Tech University is developing an ultra-high throughput surface elemental mapping technique based on measuring the light emitted from a glow discharge. It is important to obtain spatial-resolution of chemical information to order to understand natural systems and improve the efficiency of manufacturing (that is to see where impurities might be). Current imaging techniques, however, present several challenges. On the one hand, many techniques require several hours to tens of hours to obtain a surface element map with high resolution. On the other hand, current higher sample throughput techniques may not be widely accessible. Some high throughput techniques require the use of synchrotron radiation facilities which are relatively rare. Professor Gamez is working on a glow discharge optical spectroscopic technique that could potentially map element distribution 1000x faster than typical techniques. As such, imaging protocols currently limited by analysis time restrictions may become routine diagnostic tools. This research impacts many scientific research fields, from materials to biological sciences. The project also offers training opportunities to graduate and undergraduate researchers with regard to instrument development, fundamental studies, and application development in plasma-based optical hyperspectral imaging and surface analysis. Professor Gamez works with a number of local programs to recruit next generation STEM students, in particular those from underrepresented minority groups.Glow discharge optical emission spectroscopy (GDOES) has been recently shown to enable spatially resolved lateral information to be obtained from within the sputtering surface area by operating the GD in pulsed-power and at higher pressures. These modes of operation become are important as it is no longer required to raster pixel-by-pixel to obtain a hyperspectral data cube with the elemental distribution information. This savings may translates into several orders of magnitude faster analysis times. The overall goal of this project is to develop an ultrahigh throughput-, 3D-, large area surface chemical imaging technique based on GDOES. The three objectives are to: 1) develop hyperspectral imaging systems and novel GD instrumentation to enable GD 3D chemical imaging, 2) study the underlying GD mechanisms through OES and laser scattering plasma diagnostics, and 3) develop applications in materials, biological and geological sciences enabled by GDOES 3D chemical imaging. In addition to the overall goals, this research may improve comprehension of GD scaling, enhance the characterization of trends in molecular OES under GD conditions, and enable of a variety of imaging protocols in different fields.