VO2-based thin film shape memory nanoactuators

该提案代表了“基于vo2的薄膜形状记忆纳米致动器”项目的延伸。在之前的项目中，通过组合共溅射合成了（V-M）O2 （M=3rd metals）薄膜材料库，其相变性能和力学性能通过高通量方法表征。此外，已经建立了新的纳米技术工艺，以获得尺寸低至100纳米的基于vo2的纳米致动器。在纳米致动器的相变过程中，电阻变化存在尺寸效应。我们的研究表明，基于二氧化氧的器件在纳米尺度上具有巨大的电-热-机械和热致变色开关和调谐潜力，可以满足快速发展的纳米光子学领域对紧凑多功能解决方案的迫切需求。该项目的扩展解决了这一挑战，并且远远超出了目前的技术水平，将两个相互关联的部分结合在一起：子项目I （RUB）将探索到四元（V-M1-M2）O2系统，以提高薄膜的机械性能（例如，应变和应力变化）并定制相变性能。形状记忆氧化物ZrO2将与VO2结合形成新的系统（V-Zr）O2，旨在扩展应力变化和高达200°C的工作温度范围。基于新材料系统，子项目II （KIT）将开发具有增强功能和相关制造工艺的新型纳米致动器设计，以定制面外曲率和双稳态操作。基于光电机械效应和热致变色效应，以及替代电光和全光概念，将开发vo2基薄膜在光子波导开关领域的应用。

This proposal represents the extension of the project “VO2-Based Thin Film Shape Memory Nanoactuators”. During the previous project, (V-M)O2 (M=3rd metals) thin-film materials libraries have been synthesized by combinatorial co-sputtering with their phase transformation properties and mechanical performances characterized by high-throughput methods. Furthermore, novel nanotechnology processes have been established to obtain VO2-based nanoactuators with dimensions down to 100 nm. A size effect in the electrical resistance change upon the phase transformation of the nanoactuator has been identified. Our research demonstrates the large potential of VO2-based devices for electro-thermo-mechanical as well as thermochromic switching and tuning at the nanoscale, which could meet the urgent need of compact multifunctional solutions in the rapidly evolving field of nanophotonics. The project extension addresses this challenge and goes well beyond the current state-of-the art combining two interlinked parts: Subproject I (RUB) will explore up to quaternary (V-M1-M2)O2 systems in order to improve the mechanical performance of the thin film (e.g., strain and stress change) and to tailor the phase transformation properties. The shape memory oxide ZrO2 will be combined with VO2 to the new system (V-Zr)O2 aiming at an extended stress change and working-temperature range of up to 200 °C. Based on the new material systems, subproject II (KIT) will develop novel nanoactuator designs with enhanced functionality and related fabrication processes for tailoring of out-of-plane curvature and bistable operation. The application of VO2-based films in the field of photonic waveguide switching will be exploited based on the electro-thermo-mechanical and the thermochromic effect as well as alternative electro-optical and all-optical concepts.