Cooperative shape memory actuator systems for nanomechanics and nanophotonics

用于纳米力学和纳米光子学的协作形状记忆执行器系统

• 批准号: 424627294
• 负责人: Professor Dr. Manfred Kohl
• 金额: --
• 依托单位: Institut für Mikrostrukturtechnik (IMT)
• 依托单位国家: 德国
• 项目类别: Priority Programmes
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/424627294?language=en
• 关键词: Cooperative; shape; memory; actuator; systems

This proposal represents the renewal of the joint project “Cooperative shape memory actuator systems for nanomechanics and nanophotonics”. During the first funding period we demonstrated that bi-directional actuation by Joule heating above room temperature is possible for TiNiHf shape memory alloy (SMA) films with thicknesses down to 220 nm. However, trimorph PMMA/TiNiHf/Si structures envisioned for bistable actuation could only be investigated by coupled simulations so far revealing the need for thick polymer layers, which introduces issues in manufacturing and in thermal actuation. Therefore, in this project extension, we will (1) mitigate these issues by introducing and investigating novel concepts for bistable SMA actuation in-plane and out-of-plane, (2) explore and numerically describe downscaling and size effects, and (3) develop cooperative multistable in-plane and out-of-plane microactuators for Si micromechanics and Si nanophotonics applications, respectively. Bistable SMA microactuation will be based on coupled pre-strained SMA bridge microactuators. Their functionality will depend on the stress from thermal treatment and intrinsic stress from the thin film growth process. A computationally-aided iterative design process will help to identify robust and energy-efficient actuator system layouts with high precision and downsizing potential (S. Wulfinghoff). Accurately controlled material properties, including stress engineering (A. Ludwig) will be combined with state-of-the-art micromachining for the co-integration of SMA/Si microactuators with Si micromechanical and/or nanophotonic waveguide structures (M. Kohl). Based on a combined experimental and simulation-based assessment of the multistable microactuator systems, undesired cross-sensitivities will be minimized and synergies will be enhanced.

该提案代表了联合项目“用于纳米力学和纳米光子学的协作形状记忆执行器系统”的更新。在第一个资助期间，我们证明了厚度低至 220 nm 的 TiNiHf 形状记忆合金 (SMA) 薄膜可以通过高于室温的焦耳加热进行双向驱动。然而，迄今为止，用于双稳态驱动的三晶型 PMMA/TiNiHf/Si 结构只能通过耦合模拟进行研究，揭示了对厚聚合物层的需求，这在制造和热驱动中引入了问题。因此，在这个项目扩展中，我们将（1）通过引入和研究平面内和平面外双稳态 SMA 驱动的新概念来缓解这些问题，（2）探索并以数值方式描述缩小尺寸和尺寸效应，以及（3）分别为硅微机械和硅纳米光子学应用开发协作多稳态平面内和平面外微致动器。双稳态 SMA 微致动器将基于耦合的预应变 SMA 桥微致动器。它们的功能将取决于热处理产生的应力和薄膜生长过程产生的内在应力。计算辅助迭代设计过程将有助于确定具有高精度和小型化潜力的稳健且节能的执行器系统布局（S. Wulfinghoff）。精确控制的材料特性，包括应力工程（A. Ludwig）将与最先进的微机械加工相结合，以将 SMA/Si 微致动器与 Si 微机械和/或纳米光子波导结构（M. Kohl）共同集成。基于对多稳态微执行器系统的实验和模拟相结合的评估，不良的交叉敏感性将被最小化，协同效应将得到增强。