Integrated Microactuator Systems Emphasizing Ni-Mn-Ga Films with a Tailored Microstructure - INTACT - Micromachining and Integration of Ni-Mn-ga Film Actuators for Microsystems Applications

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This sub-project is part of a joint project, which intents to develop novel integrated microactuator systems based on the large strains of magnetic shape memory (MSM) alloys of up to 10 %. The main objective is to establish and validate a closed process chain to implement sputtered Ni-Mn-Ga films with bulk-like intrinsic properties in a microsystem environment. The sub-project first concentrates on the key technologies to obtain freely movable MSM microstructures. These include the micromachining and functionalizing of sputtered MSM films, which need to be compatible with the technologies to produce highly oriented films with small blocking stress. In order to meet the various constraints, individual processes on optimized buffers/substrates and corresponding transfer technologies will be required. Further technologies to be developed comprise the hybrid integration of FSMA microstructures including the electrical contacting within the plane and perpendicular to the plane of substrate. Systematic experiments will be performed on test structures and microactuators with out-of-plane operation to validate the technologies.