Ultra-compact Sub-mm Heterodyne Focal Plane Array Frontends for Radio Astronomical Observation

MMIC SIS搅拌机的研制取得了三项重大成果。首先，建立了一种片上电阻器的微加工方法，成功地制备了具有较宽电阻率范围的NbTiN薄膜电阻器。该方法发表在国际期刊《Thin Solid Films》上，对MMIC SIS混合器的开发至关重要。其次，我们对MMIC混频器中的关键器件--硅膜光波导的性能进行了实验研究。结果与理论预测吻合良好，已被接受发表。最后，我们找出了MMIC混频芯片中串扰的主要原因，并开发了芯片中衬底通孔的制作工艺。结果表明，导电通孔可以用非博世硅刻蚀工艺制造，并将发表在IEEE Trans上。关于应用超导电性。这些成果对促进对反应等离子体过程的理解具有重要意义，并将使MMIC SIS混合器的继续发展成为可能。

Three significant achievements have been made in the development of MMIC SIS mixers. Firstly, a microfabrication method for on-chip resistors was established, allowing for the successful fabrication of NbTiN thin-film resistors with a wide range of resistivity. The method were published in the international journal "Thin Solid Films" and are crucial for the development of MMIC SIS mixers. Secondly, we conducted an experiment to investigate the performance of silicon membrane waveguide transitions, a key component in MMIC mixers. The results, which agreed well with theoretical predictions, were accepted for publication. Lastly, we identified the primary cause of crosstalk in MMIC mixer chips and developed a fabrication process for through-substrate via-holes in the chips. The results showed that conductive via-holes can be fabricated using a non-Bosch silicon etching process and will be published in IEEE Trans. On Applied Superconductivity. These achievements are significant in advancing the understanding of reactive plasma processes and will allow for the continued development of MMIC SIS mixers.