Developmental Study on a compact He/Ar/XeCl Excimer Laser with Automatic Preionization

在本研究项目中，开展了自动预电离放电泵浦混合气体XeCl激光器的研制工作，取得了以下成果。研究了Ar/He混合气体对XeCl308 nm激光输出能量的影响，确定了获得最大激光输出能量的最佳气压条件。研究了用Ne/Ar混合气体代替Ar/He混合气体的XeCl308 nm激光输出能量的特性，结果表明，在2个大气压以下，Ne/Ar/XeCl激光器的激光输出能量比Ar/He/XeCl、He/XeCl和Ar/XeCl3种气体的激光输出能量大。确定了获得最大激光输出能量的最佳气压条件。结果表明，Ar/He/XeCl激光器和Ne/Ar/XeCl激光器在2个大气压以下的总气压下具有较大的激光输出能量和较长的寿命，因此构成紧凑型激光器件是可能的。设计了一种小型化、低电感、自动预电离的XeCl激光器，其中火花气体和激光头组装在一起。在最佳气压条件下，研究了激光输出能量与电路参数和预电离器间隙销结构的关系，确定了最佳条件。实验还表明，在最佳条件下工作的XeCl激光器具有较好的激光脉冲重复性和较长的寿命。在以上研究结果的基础上，最终设计并搭建了改进的混合气体XeCl激光器。

In this research project, the developmental studies on the dischargepumped gas-mixture XeCl laser with automatic preionization have been carried out and the following results have been obtained.1. Characteristics of the XeCl 308 nm laser output energy using the Ar/He gas mixture have been investigated and the optimum gas pressure conditions for obtaining the maximum laser output energy have been determined.2. Characteristics of the XeCl 308 nm laser output energy using the Ne/Ar gas mixture instead of Ar/He gas mixture have been investigated and it has been shown that the Ne/Ar/XeCl laser has the larger laser output energy at total gas pressures below 2 atmospheres than the Ar/He/XeCl, He/XeCl and Ar/XeCl lasers do. The optimum gas pressure conditions for obtaining the maximum laser output energy also have been determined.3. It has been shown from the results of 1. and 2. that the Ar/He/XeCl laser and Ne/Ar/XeCl laser have the relatively large laser output energies and the relatively long lifetimes at total gas pressures below 2 atmospheres, and hence it is possible to construct the compact laser device.4. The compact and low-inductance XeCl laser with automatic preionization has been designed in which the spark gas and laser head have been assembled in one body. Under the optimum gas pressure conditions, the dependences of the laser output energy on the circuit parameters and the configuration of preionizer gap pins have been investigated and the optimum conditions have been determined. It has been, moreover, that the present XeCl laser operated under the optimum conditions has the excellent reproducibility of the shotto shot laser pulses and the relatively long lifetime.5. Based on the above results, finally the improved gas mixture XeCl laser device has been designed and constructed.