Develonment of Binocular Scanning Electron Microscope

双目扫描电子显微镜用于精细材料的同时立体成像。在普通扫描选择显微镜（SEM）的物镜和试样之间设置一对线圈。上线圈使电子束向外偏转。较低的线圈返回到原来的焦点。对于这种路径，光束从与光轴斜的方向照射样品。与普通扫描电镜相比，双目扫描电镜具有双扫描线，单次扫描时光束向左倾斜，多次扫描时光束向右倾斜。在电梯显像管上显示奇数扫描图像，在右侧显像管上显示偶数扫描图像，用立体镜观察这两幅图像，我们可以实时观察到物体的三维形状。在三维图形定量分析算法的基础上，研究了三维形状识别问题。立体图像是识别三维形状最有效的方法。然而，在不常见的情况下，人们很少会错过识别形状。这意味着立体视觉的三维识别也依赖于学习。

Binocular scanning electron microscope has been developed for the simultaneous sterography of fine materiais.A pair of coils is set berwddn the objective lens and a specimen of the ordinary scanning election microscope (SEM). The upper coil deflestc the electron beam outward. The lower coil return it to the origianal focus. for this derour ofthe path, the beam irradiates a speciemen from the direction obluque to the optical axis. The binocular SEM has double scanning lines, as compared with the ordianry one The beam leans lecfward at odd scan, while rightward at ever scans. The odd scanning image is displayed on the lift CRT, white the even image on the right CRT Looking both images using a steroscope, we can obsaerve the 3-D shape of an object in real time.The problem in the recognition of 3-D shape has been considered to develope the algorism of quantitative analysis of 3-D figures. The stereography is the most effect method to recognize 3-D shapes. However, one rarely miss to recognize the shapes under th uncommon condition. This implies that 3-D recognition by the stereography is also depend on learnings.