EBSD-system with 3D-functionality and heating stage

微观和纳米结构研究所在纳米分析和电子显微镜中心运营电子显微镜实验室，该中心是弗里德里希-亚历山大大学埃尔兰根-纽伦堡纳米表征的中心设施。该实验室由最先进的聚焦离子束扫描电子显微镜和尖端的双校正透射电子显微镜等仪器组成，广泛用于研究功能材料和结构材料的微观结构以及结构-性能关系，其中包括一个研究培训小组、两个合作研究中心、两个优先计划和卓越启蒙计划。为了进一步扩展和充分利用现有材料表征仪器的能力，必须在现有的聚焦离子束仪器上安装现代电子背散射衍射系统。该系统能够对材料进行结晶学研究，包括在微米和纳米尺度上绘制多晶体的取向图。由于这些信息与在埃尔兰根进行的研究高度相关，电子背向散射衍射系统及其所有模式将被广泛使用。应用领域包括为透射电子显微镜和机械测试、应变测绘和晶相的三维分析(与现有的能量色散X射线光谱分析系统和切片-视图层析成像相结合)进行特定部位的样品制备。相容的原位加热阶段将被用来研究高温下的动态过程，例如，在晶粒生长和去湿过程中的织构演变。对这种动态过程的现场调查构成了Erlangen的一个研究重点，特别是在研究培训小组“使用电子、X射线和扫描探针的原位显微镜”中。

The Institute of Micro- and Nanostructure Research runs the electron microscopy laboratory in the Center for Nanoanalysis and Electron Microscopy which constitutes the central facility for nanocharacterization of the Friedrich-Alexander University Erlangen-Nürnberg. The laboratory comprises, among other instruments, a state-of-the-art focused ion beam scanning electron micrsocope and a cutting-edge double-corrected transmission electron micrsocope.The instruments are extensively used to study the microscopic structure as well as structure-property relationships of functional and structural materials in a variety of research projects including a Research Training Group, two Collaborative Research Centers, two Priority Programs and the Excellence Initative. In order to further extend and fully employ the capabilities of the existing instruments for materials characterization a modern electron backscattered diffraction system has to be attached to the existing focused ion beam instrument. The system enables crystallographic investigation of materials including orientation mapping of polycrystals at the micro and nanoscale. Because of the high relevance of this information for the research carried out in Erlangen the electron backscatter diffraction system will be extensively used with all its modes. Fields of application include the site-specific preparation of samples for transmission electron microscopy and mechanical testing, strain mapping and three-dimensional analysis of crystal phases (by combination with the existing energy dispersive X-ray spectroscopy system and slice-and-view tomography). The compatible in situ heating stage will be used to study dynamical processes at elevated temperatures, like, e.g. texture evolution during grain growth and dewetting. The in situ investigation of such dynamical processes constitutes a research focus in Erlangen and, in particular, in the Research Training Group "In situ microscopy with electrons, X-rays and scanning probes".