A Basic Study of High-accuracy Piezoelectric Vibrator Gyroscopes of Hybrid Type

提出了利用有限元法对压电振动陀螺仪进行特性预测的方法。给出了考虑平面振动的压电薄板二维振动模型的含旋转科氏力影响的有限元表达式。利用所开发的程序，演示了三种结构的输入导纳、模态振型、输出电压的传输特性随旋转的变化。单片式陀螺仪的发展被铭记。通过分析可以得出以下结论：1)在陀螺仪的有限元公式中，科氏力的固有性得到了清晰的表述。2)振动频率必须选择尽可能低，以提高旋转灵敏度。3)简并态由于旋转的作用而分离为上下模态。4)模式分离影响电输入导纳和输出电压。5)为了获得高性能，陀螺仪必须在退化模式下驱动。6)仿真结果表明，单片结构有望实现对旋转的灵敏检测，并且由于可以消除温度变化对频率变化的影响，从而提高温度稳定性，因此使用这些模式可能是有利的。温度特性是一个重要因素，其影响可以很容易地纳入到程序中。

The use of the finite element approach is proposed for the characteristic prediction of piezoelectric vibrator gyroscopes. The finite element formulation including the effect of Coriolis force due to rotation is given for a piezoelectric thin plate in plane vibration, which is considered to be of a two-dimensional model. Using the program developed, the electric input admittance, the modal shapes, the change of the transmission characteristic of the output voltage due to rotation are demonstrated for three types of configuration. The development of monolithic type gyroscopes are kept in mind.The following could be deduced from the analysis :1) The proper of Coriolis force is clearly represented in the finite element formulation for the gyroscopes.2) The vibratory frequency must be chosen as low as possible for high sensitivity to rotation.3) The degenerated modes separate into the upper and lower mode due to the rotation.4) The mode separation affects the electric input admittance and the output voltage.5) The gyroscopes must be driven at the degenerated mode for high performance.6) The simulated results show that the monolithic configurations are promising for sensitive detection of rotation and the use of these modes is possibly advantageous as the effect of the temperature change on the frequency change could be canceled to improve the temperature stability. The temperature characteristic is an important factor, and the effect can easily be incorporated in the program.