NEW METHOD OF FABRICATION AND APPLICATION OF DIELECTRIC-COATED WAVEGUIDES FOR INFRARED

1. (1)基于射频溅射的制备基于射频溅射、电镀和蚀刻技术的介质涂层金属波导的制备，其中电镀工艺是降低波导损耗的关键。我们发现，产生高应力的镀液适合于制造低损耗波导。为了制备多层介质波导，还尝试了介质材料的真空蒸发工艺。(1)电沉积锗包覆波导为了制备直径较大的锗包覆波导，发展了在金属管内电沉积锗的技术，制备了损耗小的锗包覆波导。(3)硫系玻璃的研究为了用玻璃拉拔技术制备较长的介质包覆中空波导，采用摇摆炉合成了锗和硫系硫系玻璃。研究了合成玻璃材料的折射率和吸收系数与波长的关系。(4)铝阳极氧化技术采用铝阳极氧化技术制备了铝薄膜波导。与其他沉积技术相比，该薄膜的沉积速率非常大。摘要作为介质包覆空心波导的一种应用，提出并制备了一种矩形截面的新型射频激发波导<@c@o_2>激光器，该激光器由两种介电或损耗材料和两种金属电极组成，并在其上包覆一层吸光小的薄膜。结果表明，新型波导激光器的输出功率比传统波导激光器大得多。

1. NEW METHOD OF FABRICATING DIELECTRIC-COATED HOLLOW WAVEGUIDES(1) FABRICATION BASED ON RF-SPUTTERINGTO FABRICATE DIELECTRIC-COATED METALLIC WAVEGUIDES BASED ON RF-SPUTTERING, ELECTROPLATING, AND ETCHING TECHNIQUES, THE ELECTROPLATING PROCESS IS THE MOST ESSENTIAL TO REDUCE WAVEGUIDE LOSSES. WE HAVE FOUND THAT A PLATING BATH CAUSING HIGH STRESS IS SUITABLE TO FABRICATE LOW-LOSS WAVEGUIDES. IN ORDER TO INTEND FABRICATING WAVEGUIDES WITH MULTI-LAYERED DIELECTRICS, VACUUM EVAPORATION PROCESS OF DIELECTRIC MATERIALS IS ALSO TRIED.(1) ELECTRICALLY DEPOSITED GERMANIUM-COATED WAVEGUIDESTO FABRICATE GERMANIUM-COATED WAVEGUIDES WITH RELATIVELY LARGE DIAMETER, A TECHNIQUE OF ELECTRODEPOSITION OF GERMANIUM INSIDE A METALLIC PIPE IS DEVELOPED AND WAVEGUIDES WITH SMALL LOSSES ARE FABRICATED.(3) STUDY OF CHALCOGENIDE GLASSESTO FABRICATE DIELECTRIC-COATED HOLLOW WAVEGUIDES WITH RATHER LONG LENGTH BY A GLASS DRAWING TECHNIQUE, CHALCOGENIDE GLASS COMPOSED OF GERMANIUM AND SULFUR IS SYNTHESIZED BY USING A ROCKING FURNACE. WAVELENGTH DEPENDENCE OF THE REFRACTIVE INDICES AS WELL AS THE ABSORPTION COEFFICIENTS OF THE SYNTHESIZED GLASS MATHERIALS IS STUDIED.(4) ALUMINUM ANODIZING TECHNIQUEALUMINUM THIN FILM WAVEGUIDES HAVE BEEN FABRICATED BY USING ALUMINUM ANODIZING TECHNIQUE. DEPOSITION RATE OF THE THIN FILM IS FOUND TO BE VERY LARGE COMPARED WITH OTHER DEPOSITION TECHNIQUES.2. FABRICATION OF THIN FILM-COATED WAVEGUIDE <CO_2> LasersAS AN APPLICATION OF DIELECTRIC-COATED HOLLOW WAVEGUIDES, A NEW TYPE OF RF-EXCITED WAVEGUIDE <@c@o_2> LASER WITH A RECTANGULAR CROSS SECTION IS PROPOSED AND FABRICATED WHICH IS COMPOSED OF TWO DIELECTRIC OR LOSSY MATERIALS AND TWO METALLIC ELECTRODES WHICH ARE COATED BY A THIN FILM WITH SMALL ABSORPTIONS. IT IS FOUND THAT OUTPUT POWERS OF THE NEW WAVEGUIDE LASER ARE MUCH LARGER THAN THOSE OF CONVENTIONAL ONES.