Preparation of Ordered Anodic Porous Alumina and Its Functional Applications

本论文研究了高有序阳极多孔氧化铝的形成及其在各种功能器件中的应用。主要研究结果如下：(1)研究了制备高有序多孔氧化铝的工艺条件。(2)研究了织构图形形成有序孔道的预织构工艺：基于电子束曝光法制备模具的预织构工艺和以有序排列的小颗粒为模板的预织构工艺。(3)通过对扫描电子显微镜图像进行傅立叶变换分析，定量评价了阳极多孔氧化铝中孔道的有序化程度。(4)成功地开发了几种阳极多孔氧化铝有序孔结构的复制工艺，制备了金属、聚合物和碳的有序纳米孔阵列。(5)将得到的高度有序的阳极多孔氧化铝应用于各种功能器件，如微滤、膜验证、高密度磁记录介质和功能生物器件的制备等。

In this study, the formation of highly ordered anodic porous alumina and its application to various kinds of functional devices were investigated. The obtained results were as follows.(1) The conditions for the highly ordered anodic porous alumina were widely investigated.(2) Concerning the pretexturing process, in which textured patterns generate the ordered hole arrangement of anodic porous alumina, two types of processes were studied; the process using a mold prepared by EB lithographic process, and the process using the ordered array of small particles as a template. Based on these processes, highly ordered anodic porous alumina could be obtained.(3) For the quantitative evaluation of the degree of the ordering of hole arrangement in the anodic porous alumina, Fourier transformation analysis of the SEM images was found to be useful.(4) Several types of replicating process of the ordered hole structures of anodic porous alumina were developed successfully to prepare the ordered nanohole array of metal, polymer an carbon.(5) Obtained highly ordered anodic porous alumina was applied to various functional devices, such as, microfiltration, membrane emaufication, high density magnetic recording g media, and preparation of functional bio devices and so on.