Creation of single-molecule CMOS hybrid devices

单分子的片上测量和用于生物分子相互作用的电检测的生物传感器Army TM已经被开发以创建单分子CMOS混合器件1.单分子的片上测量由于来自单分子的信号非常小，所以分子下的片上测量对于可靠和稳定的检测是必不可少的。设计了新型模拟CMOS集成电路。在使用标准CMOS工艺制造芯片之后，使用自组装单层通过电子束光刻或分子尺方法形成15 nm间隙电极。研究了电阻为几个欧姆的聚（3-辛基噻吩-2，5-二基），利用CMOS模拟集成电路转换输出阻抗，实现了高信噪比和高速度的测量，并研究了用Langmuir-Brodget方法在金电极之间形成的3 nm金胶体颗粒的紧密堆积结构。十二硫醇分子桥连在金胶体颗粒之间，桥连距离为4.6nm，检测DNA置换和杂交产生的电信号。2.全电检测生物芯片基于对生物分子间特定相互作用电荷的检测，提出了一种新型的模拟CMOS电路。扩展栅极MOSFET用于感测生物分子相互作用。传感器接口电路具有高密度（传统电路的1/1000）、低功耗（传统电路的1/1000）和高精度（传统电路的x 1000）的特点，因此大规模并行和高通量检测生物分子相互作用成为可能。在制造的CMOS LSI芯片上形成金图案作为扩展栅极，并将巯基修饰的寡核苷酸固定在扩展栅极上。DNA的固定和杂交通过16 × 16传感器阵列检测，作为二维空间分布的时间发展。

On-chip measurement of single-molecule and biosensor army TM, for electrical detection of biomolecular interaction have been developed to create single-molecule CMOS hybrid devices1.On-chip measurement of single-moleculeSince signal from single-molecule is very small, on-chip measurement under the molecule is essential for the reliable and stable detection. New analog CMOS integrated circuits have been designed. After the fabrication of chip using standard CMOS process, 15 nm gap electrodes were formed by electron beam lithography or molecular ruler method using self-assembled monolayer. Poly(3-octylthiophene-2,5-diyl)was investigated which has electrical resistance of several On. Since CMOS analog integrated circuit converts output impedance, high signal to noise ratio and high speed measurements were achieved.Another device investigated is the close-packed structure of 3 nm diameter gold colloidal particles between gold electrodes formed by Langmuir-Brodget method. Dodecanthiol molecules are bridged between gold colloidal particles with distance of 4.6 nm, and electrical signals by DNA replacement and hybridization were detected.2.Fully electrical detection biochipNew analog CMOS circuit was proposed based on the detection of charge associated with specific biomolecular interaction. Extended gate MOSFETs are utilized to sense biomolecular interaction. The sensor interface circuit features high density(1/1000 of conventional circuit), low power(1/1000 of conventional circuit), and high accuracy (x 1000 of conventional circuit), so massively parallel and high throughput detection of biomolecular interactions becomes possibleGold patterns were formed as extended gate on fabricated CMOS LSI chip, and thiol modified oligonucleotides were immobilized on the extended gate. Immobilization and hybridization of DNA were detected by 16 x 16 sensor array as time development of the two-dimensional spatial distribution.