SYNERGY OF CERAMIC FILM AND PLASTIC SUBSTRATE

大气化学气相沉积(CVD)法制备的金属羟基除了烷基碱的存在外，其结构与用凝胶法制备的干凝胶相似。在这项研究中，扩展实验是为了在塑料衬底上获得晶态金属氧化物薄膜。在较低的温度下，在硅、石英玻璃、聚酯和聚酰亚胺上制备了金属羟基薄膜。这些薄膜在相对较低的温度下进行了热处理，形成了无裂纹的晶态薄膜。用红外吸收光谱、X射线衍射仪、扫描电子显微镜、差示扫描量热仪测定了样品的结晶行为。首先，利用大气CVD装置在衬底温度120℃-360℃，气体温度300℃以下制备了非晶态钛氢氧化物薄膜，然后在500℃以下对样品进行处理。虽然在相对较低的衬底温度(如200℃)下制备的样品开始较低的退火温度，但在较高的衬底温度(如280℃)下制备的样品开始较高的退火温度。在塑料衬底上无裂纹后退火获得晶态涂层时，需要具有较大自由体积的非晶态金属-羟基薄膜。

The structure of metal-hydroxyls fabricated using atmospheric chemical vapor deposition(CVD)is thought to be similar to that of dried gel bulks fabricated using so-gel method, except existence of alkyl base. In this study, the extended experiment was performed to obtain crystalline metal-oxide films on the plastic substrate. The metal-hydroxyl films were fabricated on the Si, silica glass, PET and polyimides at relatively low temperature. These films were annealed to form crack-free crystalline films at relatively low temperature. The behavior of crystallization of the sample was determined using infrared absorption spectroscopy, X-ray diffractometry, scanning electron microscopy, differential scanning calorimetry. First of all, the amorphous titanium hydroxyl films were synthesized by an atmospheric CVD apparatus at the substrate temperature of 120°C-360°C and the gas temperature below 300°C.Then the samples were treated at the temperatures below 500°C.Although the sample fabricated at relatively low substrate temperatures(e.g.200°C)crystallization begins relatively low annealing temperature, the sample fabricated at relatively high substrate temperatures(e.g.280°C)crystallization begins relatively high annealing temperature. In obtaining crystalline coating on the plastic substrate by post-annealing without cracks, amorphous metal-hydroxyl films with large free-volume are needed.