Microarchitecture of ceramic films

在大气压下操作的化学气相沉积（CVD）能够控制陶瓷膜的微结构的形成。例如，形成控制在微米尺寸的晶须结构和网状结构。这种技术被定义为陶瓷膜的微结构。利用微结构、场致发射器件、结构材料、光学器件等都可以设计出来。在这个项目中，提出了独特的性能和结构。(1)ZnO、MgO、Y_2O_3晶须的制备建立了ZnO、MgO、Y_2O_3晶须的制备方法。(2)MgO/ZnO异质晶须MgO晶须外延生长在ZnO晶须上。X射线衍射分析表明，所有的结晶方向之间的ZnO和MgO晶须对齐。(3)荧光晶须Y_2O_3：RE（RE= Eu，Tb，Tm）晶须的光致发光强度比Y_2O_3：RE粉末的光致发光强度强。（4）场发射ZnO：Al导电晶须具有较强的场发射性能。(5)ZnO：Al导电晶须的力学性能ZnO：Al导电晶须的力学强度与Al的含量有关，当Al含量为0.2 ~ 1.0at%时，其强度很低，但当Al含量超过1.0at%时，其强度变强。

A chemical vapor deposition (CVD) operated under atmospheric pressure enables to control formation of the microstructure of the ceramic films. For example, whisker structure and mesh structure controlled at micrometer size are formed. This technique is defined as microarchitecture of the ceramic films. Using microarchitecture, field emission devices, structural materials, optical devices are able to be designed. In this project, unique properties and structures were proposed.(1) Manufacture of ZnO, MgO, Y2O3 whiskersManufacture of ZnO, MgO, Y2O3 whiskers were established.(2) MgO/ZnO heterowhiskersMgO whiskers were epitaxially deposited on the ZnO whiskers. X-ray diffractometry revealed that all crystalline directions were aligned between ZnO and MgO whiskers.(3) Phosphor whiskersPhoto-luminescence intensity of Y2O3: RE (RE= Eu, Tb, Tm) whiskers was stronger than that of powder of Y203:RE(4) Field emissionZnO:Al conductive whiskers showed relatively strong field emission properties.(5) Mechanical properties of ZnO:Al conductive whiskersMechanical strength of the ZnO:Al was dependent upon the dose of Al. Although the strength was extremely low at the Al concentration of 0.2〜1.0 at%, it became strong over 1.0 at%.