Dispersion-controlled photonic waveguide with femtosecond laser micromacining

本研究的目的是：(1)开发利用飞秒激光脉冲在硅玻璃中制造光子波导的基本技术；(2)产生50-100 MHz重复频率的超连续介质。在研究期间获得的结果如下。(1)微通道中的毛细现象当微通道与水接触时，水从入口流入微通道，最终完全充满微通道。水的上升有两个阶段：第一阶段发生得非常快，在与水接触后不到0.2s的时间内，第二阶段发生得很慢。(2)微通道的制备：通过改变飞秒激光脉冲的入射能量，微通道的直径相应地在2 ~ 50 μm之间变化。(3)三维微通道实现了具有环形结构的三维微通道。在厚度为1 mm、直径为50 μm的样品上制备通孔。(4)玻璃颗粒：随着玻璃颗粒的形成，形成微通道。我们观察到不同类型的粒子。(5)色散控制光子波导在硅玻璃中嵌入了周期性结构的微通道，但其散射损失较大。

The purpose of this research was (1) to develop the fundamental technique for the fabrication of photonic waveguides in silica glass using femtosecond laser pulses and (2) to generate supercontinuum operating at the repetition rate of 50-100 MHz.The results obtained in the research term are listed below.(1)Capillary Phenomenon in MicroChannelWhen the microchannel was in contact with water, the water flowed into the microchannel from the entrance and finally filled it completely. There were two phases in this rise of water: the first phase takes place very fast, within less than 0.2s after coming into contact with the water, and the second phase takes place slowly.(2)Fabrication of microchannelThe diameters of the channels correspondingly varied from 2 to 50 μm by varying the incident energy of femtosecond laser pulses.(3)Three-dimensional microchannelsThree-dimensional microchannels with ring structures were realized. Through-channels were fabricated in the sample thickness of 1 mm with the diameter of 50 μm.(4)Glass particleMicrochannels were fabricated with the formation of glass particles. We observed different types of particle.(5)Dispersion-controlled photonic waveguideMicrochannels were embedded with periodic structures in silica glass, however, the scattering loss was large.