High density and large area atmospheric plasma production and the industrial application by using a variable energy type barrier discharge

本研究设计了与传统介质阻挡放电不同的新型电容耦合多重放电系统（CCMD, Capacity-Coupled Multi Discharge）。产生了常压辉光等离子体，以增加（常规的5倍）等离子体输入能量，使常压辉光等离子体的截面变宽、致密化为目的，阐明了其放电机理，澄清了其电物理性质。作为工业应用，将该等离子体用于NOx的去除，并对该等离子体在废气处理材料表面处理中的技术改进和实际应用进行了研究。到目前为止，结果如下所述。1)等离子体输入能量的增加：当淬火电容器容量增加时，等离子体输入能量增加，输入能量比介质阻挡放电更大，达到120倍。2)放电电路设计：L/R<τ<CR是电路作用的必要条件，当光弧转变的特征时间为τ时，包括等离子体在内的放电电路的等效电阻为R，电感为L，淬火电容器的电容为c。3)输入能量的增加机理：在介质阻挡放电中，实验验证了表面电荷的面积效应在能量增长中出现了上限。4)直流驱动：实现了CCMD的直流驱动，并在脉冲间隔内实现了控制。5)放电机理的阐明：几十ns的微放电使针电极电位波动，实验验证了这种电位波动实现了自猝灭。6)对等离子体输入功率的控制：输入能量与介质击穿电压的比值（特别是整数部分）、淬火电容器的容量和放电频率成正比。7)微放电的传播速度：微放电的传播速度约为3×10^5 m/s。8)在臭氧生成方面的应用：在氧原料中，尝试用29针电极并联进行臭氧生成试验时，获得了41.5 g/kWh的生成效率。少

New system CCMD (Capacity-Coupled Multi Discharge : Electric discharge type which replaced the dielectric with the quenching capacitor) in this study unlike the conventional dielectric barrier discharge it was devised. The atmospheric pressure glow plasma was generated, and the research-for the purpose of increase (conventional 5 times) of the input energy to the plasma, broadening the cross section and densifying of the atmospheric pressure plasma, elucidation of the discharge mechanism and clarification of the electrophysical property was carried out. As an industrial application, this plasma was used for the NOx removal, and technology improvement and practical application, application to the material surface treatment of the exhaust gas treatment by the plasma were examined. Until now result is described in the following.1)The increase of the input energy to the plasma : The input energy to the plasma increases, when the capacity of the quenching capacitor increases, and input ener … More gy is more largest than the dielectric barrier discharge, and it becomes 120 times.2)The discharge circuit design : L/R<τ<CR is a necessary condition in the circuit action, when the characteristic time of the glow-arc transition is τ, equivalent resistance of discharge circuit including the plasma is R, inductance is L, and capacitance of the quenching capacitor is C.3)Increase mechanism of the input energy : In the dielectric barrier discharge, it was verified experimentally that upper limit occurred in area effect of surface charge in energy growth.4)DC drive : The DC drive of CCMD was realized, and it succeededd in the control in the pulse interval.5)The elucidation of the discharge mechanism : The potential of the needle electrode fluctuated by the microdischarge of several decade ns, and it was verified experimentally that self quenching was realized by this potential fluctuation.6)The control of the input power to the plasma : The input energy is proportional to the ratio (especially, the integer part) of dielectric breakdown voltage, and capacity of the quenching capacitor and discharge frequency.7)The propagation velocity of the microdischarge : The propagation velocity of the microdischarge is approximately 3×10^5 m/s.8)The application to the ozone generation : Generation efficiency of the 41.5 g/kWh was obtained in the oxygen raw material, when it tried to carry out the ozone generation test by the parallel connection of 29 needle electrode. Less