Highly Adaptive and Parallel Processing Simulation of RF Plasma Production

1.为了研究射频等离子体产生过程中的各种现象，我们开发了一个完整的模拟程序PAF，用有限元方法描述了等离子体和电磁场的时间演化。2.改进了二维波的传播和扩散传输模块TASK/WF+Tf。在波动分析中，麦克斯韦方程作为带位势的定常边值问题求解，扩散输运方程采用全隐式方法求解。3.将波传播模块TASK/WF扩展到三维构型，并引入边缘单元法，抑制伪解，提高计算精度。研究了不同类型的波导、螺旋天线和同轴天线对波浪的激励作用，并与二维分析结果进行了比较。4.采用自适应三角形单元，采用有限元方法，开发了二维粒子模拟模块TASK/PF。该模型考虑了弹性碰撞、电离、激发和电荷交换等原子-分子过程的影响，并被应用于射频等离子体产生的静电模拟。5.通过哈密顿-李变换，导出了一个新的陀螺动力学方程。在此基础上开发了一种新的回转动力学粒子模拟程序，并将其应用于分析磁化等离子体中的鞘层形成。6.根据该研究项目组装了32个CPU(Intel Xeon 2.2 GHz)的PC集群，高度并行化的程序证实了其计算的高性能。

1.In order to investigate various phenomena in RF plasma production, we have developed an integrated simulation code PAF that describes time evolution of the plasma and the electromagnetic field with the finite element method.2.We have improved the two-dimensional wave propagation and diffusive transport modules, TASK/WF+TF. In the wave analysis, Maxwell's equation is solved as a stationary boundary-value problem with potentials, and the diffusive transport equation is solved with the full implicit method. The matrix solver using the wave front method was parallelized with the MPI library.3.The wave propagation module TASK/WF was extended to the three-dimensional configuration and the edge element method was introduced to suppress the spurious solutions and improve the accuracy. The wave excitation by various kinds of waveguides, helical antenna and coaxial antenna was studied and the results were compared with those of two-dimensional analysis.4.The two-dimensional particle simulation module TASK/PF was newly developed with the finite element method using highly adaptive triangular elements. The module now includes the effects of atomic-molecular processes, such as elastic collision, ionization, excitation and charge exchange, and was applied to the electrostatic simulation of RF plasma production.5.A new formulation of the gyrokinetic equations was derived by means of the Hamiltonian-Lie transformation. A new gyrokinetic particle simulation code was developed based on this formulation and applied to the analysis of the sheath formation in a magnetized plasma.6.The PC cluster of 32 CPUs (Intel Xeon 2.2 GHz) was assembled by this research project and highly-parallelized codes confirmed its high performance of computation.