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Fabricatio of Photonic Devices Using Photosensitive Gel Films and Their Properties

Fabricatio of Photonic Devices Using Photosensitive Gel Films and Their Properties
光敏凝胶薄膜光子器件的制备及其性能
批准号:
12555179
负责人:
TOHGE Noboru
金额:
$3.58万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
2000
资助国家:
日本
项目状态:
已结题
起止时间:
2000 至 2001

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中文摘要
翻译
1)化学改性法在ITO涂层石英玻璃基片上制备PZT薄膜:采用化学改性法在ITO涂层石英玻璃基片上制备了PZT薄膜,并研究了其电学性能。研究发现,用射频磁控溅射法制备ITO薄膜时,氧分压对PZT薄膜的性能有很大影响。2)含Eu^<3+>光敏凝胶薄膜的制备:对含Eu ^<3+>光敏凝胶薄膜进行紫外辐照和浸提,可以制备出发光图形。二维光栅的制作及其减反射效应:采用双光束干涉法在光敏凝胶薄膜上制作了二维表面浮雕光栅。在石英玻璃基片上形成岛状二维光栅,大大降低了波长范围内的表面反射, ...更多信息 4)甲基丙烯酸对化学改性凝胶膜光敏性的影响:发现用β-二酮和甲基丙烯酸改性醇锆所得到的光敏凝胶膜比不加甲基丙烯酸的凝胶膜厚。5)用羟基取代的芳酮制备光敏ZrO_2凝胶膜:为了开发新的光敏凝胶膜,采用溶胶-凝胶法,以羟基取代的芳香酮对正丁醇锆进行化学改性,制备了ZrO_2凝胶膜。凝胶膜在约400 nm处获得吸收光。对于凝胶膜,用He-Cd激光束照射可以制作出线条和圆形图案。6)光敏ZrO_2凝胶膜的选择性着色:利用光敏凝胶膜开发了一种新的选择性着色工艺。7)化学改性钛醇盐的光吸收和电子态:用DV-X α簇方法计算了不同取代基的β-二酮稳定的钛醇盐的电子态。讨论了光吸收的来源和醇盐在光照射下的分解反应机理。少
英文摘要
1)Fabrication of PZT Films on ITO-Coated Substrate by the Chemical Modification Method : PZT films were fabricated on ITO-coated silica glass stubstrates by the chemical modification method and their electrical properties were studied. The properties of the PZT films fabricated were found depend on the oxygen partial pressure when ITO films had been prepared by RF magnetron sputtering.2)Preparation of Photosensitive Gel Films Containing Eu^<3+> : Luminescent patterns could be fabricated by UV-irradiation and leaching for the photosensitive gel films containing Eu^<3+>. Correlation between luminescent properties and using matrix were also discussed.3)Fabrication of Two-Dimensional Gratings and Their Antireflection Effects : Two-dimensional (2D) surface-relief gratings have been fabricated by the two-beam interference method on photosensitive gel films. The formation of 2D-grating of island type on a silica glass substrate substantially reduced the reflection at its surface in a waveleng … More th range of 1.3 to 2.6 mm.4)Effects of Methacrylic Acid on the Photosensitivity of Chemically Modified Gel Films : It has been found that the photosensitive gel films obtained from Zr-alkoxide modified with β-diketone and methacrylic acid can be thicker than the gel films without methacrylic acid.5)Preparation of Photosensitive ZrO_2 Gel Films Using Hydroxyl-sustituted Aromatic Ketones : In order to develop new photosensitive gel films, ZrO_2 gel films were prepared from zirconlum butoxide chemically modified with hydroxyl-substituted aromatic ketones by the sol-gel method. The gel film obtained absorbed light at around 400 nm. For the gel films, line and circle patterns could be fabricated by He-Cd laser beam irradiation.6)Selective Coloration of Photosensitive ZrO_2 Gel Films : A selective coloration process has been newly developed utilizing photosensitive gel films. The dye-containing SiO_2 gel film on the unirradiated part of the ZrO_2 gel film remained, while that on the irradiated part was removed upon rinsing.7)Optical Absorption and Electronic State of Chemically Modified Ti-Alkoxides : Electronic state of titanium alkoxides stabilized with β-diketones which had various substituents was calculated by the DV-X α cluster method. The origin of the optical absorption and the mechanism of the decomposition reaction of alkoxides with irradiation of light were discussed. Less
期刊论文(38)
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会议论文
N.Tohge, H.Tada, S.Ito: "Photocatalytic Properties of a Patterned TiO_2/SnO_2 Bilayer Prepared Using Photosensitive TiO_2 Gel Films"Materials Science for the 21th Century. Vol.B. 130-133 (2001)
N.Tohge、H.Tada、S.Ito:“使用光敏 TiO_2 凝胶薄膜制备的图案化 TiO_2/SnO_2 双层的光催化性能”21 世纪材料科学。
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N.Tohge, M.Hasegawa, N.Noma K.Kintaka, J.Nishii: "Fabrication of Two-Dimensional Gratings Using Photosensitive Gel Films and Their Characterization"J.Sol-Gel Sci.Technol. (印刷中). (2002)
N. Tohge、M. Hasekawa、N. Noma K. Kintaka、J. Nishii:“使用光敏凝胶薄膜制作二维光栅及其表征”J. Sol-Gel Technol。 )
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J. Nishii, K. Kintaka, N. Tohge, M. Hasegawa, N. Noma, A. Mizutani and H. Kikuta: "Low Reflection Microstructure Formed by Sol-Gel Process"(Submitted for publication in Appl. Opt).
J. Nishii、K. Kintaka、N. Tohge、M. Hasekawa、N. Noma、A. Mizutani 和 H. Kikuta:“通过溶胶-凝胶工艺形成的低反射微结构”(提交在 Appl. Opt 中发表)。
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K.Kintaka, J.Nishii, N.Tohge: "Micropatterning of Photosensitive Gel Films Using the Two Ultraviolet Beam Interference Method"SPIE Proc.Sol-Gel Optics V. 3943. 38-46 (2000)
K.Kintaka、J.Nishii、N.Tohge:“使用两束紫外线干涉法对感光凝胶薄膜进行微图案化”SPIE Proc.Sol-Gel Optics V. 3943. 38-46 (2000)
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共 19 条
    Photosensitivity Mechanism of Chemically Modified Gel Films and Their Application to the Fabrication of Micro-Devices
    • 批准号:
      11650866
    • 项目类别:
      Grant-in-Aid for Scientific Research (C)
    • 资助金额:
      $2.3万
    • 财政年份:
      1999
    • 负责人:
      TOHGE Noboru
    • 依托单位:
    Preparation of Functional Thin Films and Fine-Patterning by the Photo-Assisted Process
    • 批准号:
      09650930
    • 项目类别:
      Grant-in-Aid for Scientific Research (C)
    • 资助金额:
      $2.18万
    • 财政年份:
      1997
    • 负责人:
      TOHGE Noboru
    • 依托单位:
    Preparation and Characterization of Ferroelectric Thin Films for Memories by the Chemical Process
    Preparation of Ferroelectric Films by the Sol-Gel Method
    • 批准号:
      62550570
    • 项目类别:
      Grant-in-Aid for General Scientific Research (C)
    • 资助金额:
      $1.22万
    • 财政年份:
      1987
    • 负责人:
      TOHGE Noboru
    • 依托单位:
    海外基金