Ultimate high frequency nanoresonator for RF signal processing

本研究的目的涉及高频纳机电谐振器（基本谐振频率应在GHz范围内）的制造和表征，使用隧道检测作为输出转导，或电容耦合检测。第一个目标旨在证明高频纳机电谐振器（fo> 1GHz）的可行性。为此，已经制造了基于叶片几何形状和电容耦合检测的谐振器。为了抑制寄生馈通，已经执行了基于混频的测量设置，并且<nd>已经成功地展示了分别在1.104 GHz和2.5 GHz处的基本谐振和2^模式的表征。在第二项研究中，一个多模式的原子力显微镜（AFM）在非接触模式下工作，以提取静电驱动的硅桥谐振器（在10 MHz的频率范围内）的机械响应。该表征方法允许检测埃级振动，并且随后将在扫描隧道显微镜（STM）模式下进行相同的实验。第三部分结合了前两个项目的方法，并处理与纳米定位致动器集成的RF纳米机电谐振器的制造，用于激励和隧道检测及其在TEM室中的表征。谐振器机械响应（f0=263kHz）的直接光学表征已经得到验证，并且在隧道尖端缩回序列期间已经执行了谐振器I（V）特性的静态测量。目前正在研究动态模式下的测量，以证明谐振器的谐振频率周围的隧道电流的调制。

The aim of this research concerns the fabrication and characterization of high frequency nanoelectromechanical resonators (fundamental resonance frequency of which should be in the GHz range), using either the tunnel detection as the output transduction, or capacitive coupling detection. The first objective aimed at demonstrating the feasibility of a high frequency nanoelectromechanical resonator (fo>1 GHz). For this purpose, a resonator based on a blade geometry, and capacitive coupling detection, has been fabricated. A mixing-based measurement set-up has been performed in order to suppress parasitic feedthrough, and characterization of fundamental resonance and 2^<nd> mode at respectively 1.104 GHz and 2.5 GHz has been successfully demonstrated. In a second study, a multimode Atomic Force Microscope (AFM) operating in non-contact mode was used in order to extract the mechanical response of electrostatically actuated silicon bridge resonators (in the 10 MHz frequency range). This characterization method allowed to detect angstrom-scale vibration and the same experiments will be performed afterwards in Scanning Tunnel Microscope (STM) mode. The third part combined the two first approaches of the project and deals with the fabrication of RF nano-electromechanical resonators integrated with nano-positioning actuators for both excitation and tunnel detection and its characterisation in TEM chamber. Direct optical characterisation of the resonator mechanical response (f0=263kHz) has been validated, and static measurements of the resonator I(V) characteristics during the tunnel tip retraction sequence has been performed. The measurements in dynamic mode are currently investigated in order to demonstrate the modulation of the tunnel current around the resonance frequency of the resonator.