Development of software gauge and material measure with large area to standardize analytic tools for surface topography data

对于当今的工业产品来说，表面纹理已经成为影响其表面质量和功能性能的重要因素。由于缺乏尺寸自由度，用轮廓法很难正确地评价表面粗糙度。然后，需要对表面纹理进行面状测量和评估。为此，需要使用三维表面形貌测量仪器。目前，ISO技术委员会正在讨论面状表面纹理的评估程序和校准方法。并提出了仪器校准的具体措施，作为区域校准标准。然而，由不规则微观几何形状组成的三维粗糙度标准并未包括在草案中。这类测量标准本质上是用来识别仪器的具体测量特性。为了验证计算表面粗糙度参数的软件程序，软件…基于非因果二维自回归模型，发展了具有随机表面形貌数据的更多量规。用同样的方法产生了数控加工数据，前提是材料测量是由小直径球头立铣刀机械制造的。通过已知刀具直径和刀尖几何形状，引入了最小波长和最小幅度，并对表面粗糙度标准进行了几何模拟。使用显微镜对刀具几何形状进行光学测量。结果表明，仿真结果与刀具几何形状直接相关。设计并制造了一台精密铣床。然后用生成的NC数据制造实物测量。在表面粗糙度参数方面，将触针仪的测量结果与模拟结果进行了比较。根据准备好的数据，确认是否可以加工材料尺寸。除了实验机外，还利用市场上的超精密机床制造了材料量具，通过将测量结果与模拟结果进行比较，研究了制造的材料量具的有效性。在手写笔仪器的情况下，这两个结果彼此接近。但激光显微镜、光学针头、白光干涉仪等光学仪器从模拟结果中得到了不同的测量结果。地形扫描电子显微镜也是相似的。由于本研究中的实物测量是由理论上生成的NC数据进行的，因此可以得出结论，所开发的制造系统以及实物测量本身对市场上的表面形貌仪器的标定是实用的。较少

As to the industrial products nowadays, surface texture has become much more important factor to affect their surface quality and functional performances. It is difficult to properly evaluate the surface texture by the profile method due to shortage of dimensional freedom. Then areal measurement and evaluation of the surface texture has been required. For this reason, 3-D surface topography measurement instruments are to be used. Assessment procedures for areal surface texture and calibration method are now under discussion in the technical committee of ISO. And some material measures for calibration of the instruments are proposed as the areal calibration standards. However, 3-D roughness standard composed of irregular micro geometry is not included in the draft. Such kinds of measurement standards are essentially used to identify the specific measurement characteristics of the instruments.In order to verify the software programs for calculating surface texture parameters, a software … More gauge with random surface topography data based on a non-causal 2-dimensional autoregressive model was developed. The NC machining data was produced by the same method.It was premised that the material measures is mechanically made by ball end-mill with small diameter. Minimum wavelength and amplitude was introduced by knowing the cutter diameter and tip geometry, and surface roughness standard was geometrically simulated. The cutter geometry was optically measured using a microscope. It was revealed that the simulation results were directly linked to the cutter geometry.An accurate milling machine was designed and constructed. Then the material measures were manufactured with the generated NC data. Measured results by a stylus instrument were compared with the simulation results in terms of surface texture parameters. Confirmation was made whether the material measure could be machined by following the prepared data. In addition to the experimentally constructed machine, an ultra-precision machine on the market was utilized to manufacture the material measures.Validity of the manufactured material measures was studied by comparing the measured results with the simulation results. In the case of a stylus instrument, both results were close to each other. But optical instruments such as laser microscope, optical stylus and white light interferometer produced different measured results from the simulation result. Topography SEM is also alike. Since the material measure is truly made by the theoretically generated NC data in this study, it may be concluded that the developed manufacturing system as well as the material measure itself are practically useful for calibrating the surface topography instruments on the market. Less