Optical measurement system of radial-, axial- and angular-motion error for small diameter cylinder utilizing SLD

研制了基于光学虚拟V块法的三维跳动误差测量系统。首先，给出了利用光学虚拟V块法消除被测物特征误差对测量值影响的方法和倾斜误差运动的测量方法。给出了用被测物的偏心和倾斜分离主轴跳动误差的方法。在此基础上，设计了跳动误差测量系统。测量系统由两个测量平面和信号处理器组成。在测量平面上安装了三个透光式位移传感器。利用该装置测量了两个节段的径向误差运动。在此基础上，计算了三维的跳动误差。为了估计50UPR以内的跳动误差，确定了决定光学虚拟V块方法性能的夹角和倾角的最佳值。因此，它们分别为=55°和=12°。结果表明，上测量面的静稳定性为±0.67m，下测量面的静稳定性为±0.92m。周围光线的影响很小。利用该系统在机床上对主轴跳动误差进行了测量。并将电容式位移传感器双探针法的测量结果与所研制系统的测量结果进行了比较。在双探针法测量中，由于被测物体的特征误差，测量精度不够高。由于位移传感器的测量精度较差，无法测量所研制系统的跳动误差。在实际机床上测量主轴跳动误差，需要提高位移传感器的测量精度。

The run-out error measurement system of three dimensions using optical virtual V-block method was developed. In the first, the method for eliminating the influence of the feature error of the measured object from measured value that used optical virtual V-block method and the measurement method of the tilt error motion ware shown. Then, the method for separating the spindle run-out error by eccentricity and tilt of the measured object war separated from the measured value was shown. Based on these theories the run-out error measurement system has been designed. The measurement system is composed of the two measuring plane and the signal processor. In the measuring plane the three displacement sensors utilizing transmitted light method are mounted. The radial error motion at two sections was measured with this device. Then the run-out error of three dimensions was calculated. To estimate the run-out error within 50UPR, the best values of included angle and tilt angle that decides the performance in optical virtual V-block method were determined. Therefore they were =55° and =12°.The perform ance of the developed measurement system was evaluated. As a result, static stability is ±0.67 m in the upper measurement plane and ±0.92 m in the lower measurement plane. There was little influence of the ambient light. The spindle run-out error was measured on machine with this system. Moreover, the measured result by two-probe method with capacitance displacement sensor was compared with the result by the developed system. In the measurement of two-probe method, the measurement accuracy was not enough because of the feature error of the measured object. The run-out error with developed system could not be measured because of poor measurement accuracy of the displacement sensor. To the measure the spindle run-out error on the actual machine tool, the improvement of measurement accuracy of the displacement sensor should be needed.