Cylindricity Measurement System by Optical V-block Method

研制了光学v块法圆度测量系统。该系统采用了传输激光束功率的检测技术，可作为过程测量系统。此外，还阐明了圆柱度测量系统的可行性。大纲如下所述。(1)将机械v块法圆度测量改进为光学v块法在被测截面上的完全非接触测量。通过这种改进，使除支撑截面外的其他截面圆度测量成为可能。(2)针对光学v块法切线式位移传感器，给出了模拟圆度测量几何误差的理论。因此，测量误差为2%或更小。(3)与市售光学圆度测量仪测量结果相比，圆度误差在0.5 μm以内。(4)所开发的系统测量时间短，只需15秒，被测气缸的安装/拆卸也很方便。因此，将所开发的系统应用于自动化生产线是可能的。(5)所研制的系统可实现旋转误差的测量和补偿。虽然所开发系统的旋转误差较大，但通过补偿，实现了高精度的圆度测量。(1)给出了扩展光学v块法圆柱度测量的理论公式。(2)通过光学v块沿被测圆柱体轴向平行运动，实现了多个截面的圆度测量。(3)通过了解被测多个截面形状的位置关系，使圆柱度测量成为可能。

The roundness measurement system by optical V-block method was developed. This system applies a detection technique of the transmitted laser beam power and can be used as in-process measurement system. In addition, the feasibility of cylindricity measurement system was clarified. The outline is described in the following.1. The roundness measurement system(1) Roundness measurement by mechanical V-block method was improved into perfectly noncontact measurement on the measured cross section by optical V-block method. By this improvement, the roundness measurement in the cross section except for support cross section became possible.(2) On tangent style displacement sensor for optical V-block method, the theory for simulating the geometric error in the roundness measurement was shown. As a result, the measurement error was 2% or less.(3) In comparison with measurement result by developed system and one by optical roundness measuring instrument of marketing, the difference of roundness was within 0.5 μm.(4) The developed system requires short measuring time of 15 seconds and mounting/dismounting of measured cylinder is also easy. Therefore it is possible to take the developed system into the automated manufacturing line.(5) Measurement and compensation of the rotation error are possible for the developed system. Though rotation error of the developed system was large, roundness measurement was achieved with high accuracy by compensation.2. Cylindricity measurement system(1) The theoretical formula for expanding the optical V-block method for the cylindricity measurement was shown.(2) By parallel movement of the optical V-block along axial direction of measured cylinder, the roundness measurement in multiple cross sections became possible.(3) By knowing the positional relation of multiple cross-sectional shape measured, the cylindricity measurement became possible.