In-process roundness measurement system for cylindrical machine parts of small diameter w|th run-out error compensation

带跳动误差补偿的小直径圆柱形机器零件的在线圆度测量系统

• 批准号: 12650131
• 负责人: YAMADA Ryuichi
• 金额: $ 2.3万
• 依托单位: Nagaoka National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2000
• 资助国家: 日本
• 起止时间: 2000 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12650131/
• 关键词: Optical measurement; Cylindrical parts of small diameter; Run-out locus; Roundness; SLD(Super Luminescent Diode); V block method; In process measurement; 微小経円筒体; イップロセス測定

An objective of our study is to develop an in-process measurement system which can evaluate both the roundness of turned cylindrical part and the rotational error of lathe spindle, Cylindrical parts to be measured are smaller than 2 mm in diameter and the target measurement accuracy of the system is the range of sub-micrometer. The Developed system is composed of measurement instrument, signal processing equipment and data analysis system. The measuring instrument of the developed system consists of three optical sensing units. Each unit has a parallel light beam and twin photo diodes to detect the asymmetrical beam power distribution, A cylindrically turned work is set within the crossing of the three light beams, where two of them are orthogonal. The work displacement perpendicular to each beam axis can be detected from the difference signal of the related twin photo diodes. Then the run-out locus of the work can be drawn as a Lisajous figure using the two orthogonal sensing units.As … More to the roundness measurement of the work itself, so-called V-block method was adopted. The two sensing units may be regarded as an optical virtual V-block and the remaining sensing unit as a tangential type displacement sensor.The measurement experiment was carried out with turned cylindrical part of 1mm in diameter at 300 rpm. As a result, the roundness profile by developed system is in rough agreement with the roundness profile by commercial instrument in undulation per revolution (UPR). The form error which was included in the run-out locus was effectively compensated. The run-out locus before the compensation was the square locus which was similar to simulation result, when small cylindrical part which mainly contains amplitude of 3rd UPR were used. Then, the value of radial circular run-out was 1.24μn. As a result of compensation using the measured roundness profile, the square corner became round, and the value of circular run-out decreased to 0.71μm. Consequently, it was able to be confirmed that the developed system was the run-out error measuring system in which the roundness profile of the cylindrical part did not influence in the run-out locus. Less

本研究的目的是研制一套能同时评定车床主轴回转误差和车削圆度的在线测量系统，被测零件直径小于2 mm，测量精度目标为亚微米级。研制的系统由测量仪器、信号处理设备和数据分析系统组成。该系统的测量仪器由三个光学传感单元组成。每个单元有一个平行的光束和两个光电二极管来检测光束的不对称功率分布，在三个光束的交叉处设置一个圆柱面转动的工作，其中两个光束是正交的。从相关的双光电二极管的差值信号中可以检测出垂直于每个光束轴线的工作位移。然后，可以使用两个正交传感单元将工作的跳动轨迹绘制为利扎霍图形。AS…对于工作本身的圆度测量，采用了所谓的V块方法。两个传感单元可视为一个光学虚拟V形块，其余传感单元可视为切线型位移传感器。测量实验以直径1 mm的旋转圆柱体零件为例，转速为300rpm。结果表明，所研制的系统得到的圆度轮廓与商品化的每转波动圆度轮廓基本吻合。有效地补偿了跳动轨迹中包含的形状误差。补偿前的跳动轨迹为方形轨迹，与仿真结果相似，当采用小圆柱体时，主要包含3次UPR的幅值。径向圆度跳动值为1.24μn，利用测量的圆度轮廓进行补偿，使圆角变圆，圆度跳动值降至0.71μm，从而确认所研制的系统是圆柱体圆度轮廓不受跳动轨迹影响的跳动误差测量系统。较少

项目成果

YAMADA Ryuichi: "Roundness Measurement System for cylindrical machine parts of small diameter with run-out error compensation(2nd Report)"2001, JSPE Spring Meeting Lecture Papers. 561 (2001)

山田龙一：“带有跳动误差补偿的小直径圆柱机械零件的圆度测量系统（第二报告）”2001年，JSPE春季会议演讲论文。

YAMADA Ryuichi: "In-process roundness Measurementsystem for cylindrical machine parts of smalldiameter with run-out error compensation"Procs. of ASPE 2000 ANNUAL MEETING, SCOTTSDALE ARIZONA USA. 454-457 (2000)

山田龙一：“带有跳动误差补偿的小直径圆柱机械零件的过程圆度测量系统”Procs。

山 田 隆 一: "小径円筒体を対象とした回転振れ回りと真円度の光学式同時測定システムの開発(第2報)"2001年度精密工学会春季学術講演会講演論文集. 561 (2001)

山田龙一：“小直径圆柱体旋转涡流和圆度同步光学测量系统的开发（第2次报告）”2001年日本精密工程学会春季学术会议论文集（2001）561。

Ryuichi YAMADA: "In-process roundness measurement system for cylindrical machine prats of small diumeter with run-out error compensation"Proc.of ASPE 2000 ANNUAL MEETING. 454-457 (2000)

Ryuichi YAMADA：“带跳动误差补偿的小直径圆柱形机器零件的过程圆度测量系统”ASPE 2000 年年会议程。

YAMADA Ryuichi: "In-process roundness measurement system for cylindrical machine parts of small diameter with run-out error compensation"Procs.of ASPE 2000 ANNUAL MEETING, SCOTTSDALE ARIZONA USA. 454-457 (2000)

YAMADA Ryuichi：“带跳动误差补偿的小直径圆柱形机器零件的过程中圆度测量系统”Procs.of ASPE 2000 年年会，美国亚利桑那州斯科茨代尔。