3D micro/nano structures for micro-chemo-mechatoronics

本研究的目的是建立利用半导体加工技术和机械加工技术创建微化学-机电一体化三维精细结构的技术。除了传统的MEMS技术和化学改性技术外，还采用机械超精细加工技术，如电解抛光、电火花加工、光束沉积、组装、键合、压花、注塑等，制造出具有三维精细结构的微化学仪器，用于化学分析。在本研究中，我们将微纳结构分为针状结构、管状结构和通道状结构。针状结构：开发了利用扫描电镜光束生成碳纳米线的电子束沉积法（EBD），作为纳米级针状结构的制造技术。利用这种针状结构，研制了DNA探针处理工具和近场光学显微镜散射探针。此外，还对EBD探针的导电控制进行了试验，并将其应用于微电极、微传感器等领域。为了生成结晶石墨结构而不是无定形EBD，我们在电子显微镜下布置了碳源给料器、催化剂和催化剂活化加热设备。因此，产生了被认为是结晶的碳沉积。管状结构：研究了用聚焦离子束加工微玻璃管并产生管状结构。作为应用实例，研制了一种微型移液器，通过在移液器内部制备固定体积的微升级亲水性区域来进行定量分配。并将压电装置垂直驱动的微移液器与可控亲水性基板相结合，开发了在基板上产生液滴的系统。类沟道结构：现阶段主要采用湿法或干法蚀刻等化学工艺制造玻璃沟道芯片的机械加工方法，高速、低成本，可用于微化学分析仪器的批量生产。例如，尝试了通过注入器将玻璃薄片涂覆在基片上，形成通道，烧结并产生玻璃芯片的加工方法。此外，针对玻璃腐蚀试剂和高温高压反应，研制了具有优良传热性能和抗冲击性能的金属微反应器。结果表明，结合切割形成凹槽的方法和YAG激光焊接覆盖层的方法，可以生产出400微米宽通道的不锈钢多层切屑。少

The purpose of this research is establishing the technology to create the 3-dimensional fine structures for micro-chemo-mechatronics with semiconductor processing technology and machining technology.In addition to the conventional MEMS technique and chemical modification technology, mechanical ultra-fine processing technology, such as electrolysis polish, electrical discharge machining, beam deposition, assembly, bonding, embossing, injection molding, and so on is used to create microchemistry instruments equipped with the 3-dimensional fine structures for chemical analysis. In this research, we classified micro/nano structure into needlelike, tubular, and channel-like structure as the following items.Needlelike structure : The electron beam depositing (EBD) method which generates carbon nano-wire using the beam of a scanning electron microscope was developed as manufacturing technology of the nano meter scaled needlelike structure. Using this needlelike structure, handing tool of DNA … More and scattering probe for near-field optical microscope was developed. Furthermore, conductive control of an EBD probe was tried for the application to a micro electrode, micro sensor, etc. In order to generate crystalline graphite structure instead of amorphous EBD, we arranged the source feeder of carbon, a catalyst, and the heating equipment for activation of the catalyst in an electron microscope. As the result, the carbon deposition considered to be crystalline was generable.Tubular structure : Research which processes a micro glass pipe using focused ion beam and produces tubular structure has been done. As an example of application, micro pipet which performs fixed quantity dispensing by preparing hydrophilic area of the fixed volume of pico liter order in the interior of the pipet was developed. And also, the system which generates droplet on a substrate with the combination of the micro pipet verticaly drived by the piezo-electric device, and the substrate with controlled hydrophilicity was developed.Channel-like structure : The mechanical processing method for manufacturing glass channel chips mainly manufactured by the chemical technique such as a wet or dry etching at this stage, at high speed and low cost has been developed for mass-production of micro chemical analysis instruments. For example, processing method which coat a substrate with the glass flit by an injector, form channels, sinters and produces a glass chip was tried. Furthermore, in order to treat the reagent which makes glass corrode, and the reaction which generates excessive heat and pressure, the metal micro-reactor excellent in heat transfer and shock resistance was developed. It was shown that combining the cutting method for formation of the groove, and the bonding technology of the cover by the YAG laser-welding method, the multilayer chip made from stainless steel with 400 micrometers width channels is producible. Less