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Development of micro-cell-plasma driven by radio frequency for PDP

Development of micro-cell-plasma driven by radio frequency for PDP
射频驱动PDP微细胞等离子体的开发
批准号:
09450146
负责人:
MAKABE Toshiaki
金额:
$7.81万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
1997
资助国家:
日本
项目状态:
已结题
起止时间:
1997 至 1999

项目摘要

项目成果

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相关文献

中文摘要
翻译
(1)研究的基本依据是“驱动频率与维持等离子体尺寸的关系”。首次采用一维t模型研究了微电池的维持电压随压力、距离和频率的变化规律。(2)本文对由三电极平行板系统组成的等离子体显示器在100 kHz驱动下的写入、扫描和擦除过程进行了数值研究。结果,这三个电极的功能已经被阐明。在低频下驱动的传统PDP的显著缺点是由于在单元中产生的大量离子向壁的传输导致的大的能量损失。(3)本文用Boltzmann方程的直接数值方法研究了氖和氘的混合气体对电子群参数的影响。建立了电子群参数数据库。(4)本文提出了一种微米尺度的电容耦合圆柱形细胞等离子体作为“微细胞等离子体”。对MCP在50 MHz驱动下的特性进行了详细的模拟和讨论。
英文摘要
(1) The fundamental basis of the research is in the "relation between the driving frequency and the maintained plasma size". The sustaining voltage as a function of pressure, distance and frequency is first investigated by using 1D-t modeling up to the size of micro cell.(2) Conventional plasma display panel, which consists of three electrodes parallel plate system covered by a thin insulator, driven at 100 kHz is numerically investigated as for the writing, scanning, and erasing. As a result, the function of these three electrodes has been clarified. The significant disadvantage of the conventional PDP driven at low frequency results from a large energy loss by the transport of massive ions produced in the cell to the wall.(3) Direct numerical procedure of the Boltzmann equation has been applied to investigate the influence of the gas mixture between Xe and Ne on the electron swarm parameter. The database of the electron swarm parameter has been constructed.(4) A capacitively coupled cylindrical cell plasma with micro meter size is proposed for "the Micro-Cell-Plasma". The characteristics of MCP driven at 50 MHz are simulated and discussed in detail.
期刊论文(25)
专著(0)
科研奖励(0)
会议论文
J. Sumioka, M. Kurihara and T. Makabe: "2D modeling of a conventional PDP in Xe with three electrodes system"Proc of 17th Symp on Plasma Proceeding. 283-286 (2000)
J. Sumioka、M. Kurihara 和 T. Makabe:“具有三电极系统的 Xe 中传统 PDP 的 2D 建模”Proc of 17th Symp on Plasma Proceeding。
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通讯作者:
M.Kurihara: "RF plasma characteristics in a micro-cell in Xe by using RCT model" Extended abstracts in 4^<th> Int.Cont.on Reactive Plasmas. 39-40 (1998)
M.Kurihara:“使用 RCT 模型在 Xe 中的微电池中实现 RF 等离子体特性”第 4 期 Int.Cont.on Reactive Plasmas 中的扩展摘要。
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M.Hasebe: "2D modeling of nonvolatile particle transport from etched surface in RIE" Proceedings of 15^<th> Symp.On Plasma Processing. 1. 186-189 (1998)
M.Hasebe:“RIE 中蚀刻表面的非挥发性颗粒传输的二维建模”第 15 期 Symp.On 等离子体处理论文集。
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真壁利明、栗原優: "Frequency characteristics in a micro-cell plasma in Xe by using RCT model"Program of the 52th GEC. 44, No.4. 19 (1999)
Toshiaki Makabe、Yu Kurihara:“利用 RCT 模型研究 Xe 中微细胞等离子体的频率特性”第 52 届 GEC 计划,第 44 期,第 19 期(1999 年)。
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共 23 条
    Development of micro plasma display pannel driven by radio frequency
    • 批准号:
      09555111
    • 项目类别:
      Grant-in-Aid for Scientific Research (B)
    • 资助金额:
      $6.78万
    • 财政年份:
      1997
    • 负责人:
      MAKABE Toshiaki
    • 依托单位:
    Development of low temperature rf plasma model for material process
    • 批准号:
      08044169
    • 项目类别:
      Grant-in-Aid for international Scientific Research
    • 资助金额:
      $2.94万
    • 财政年份:
      1996
    • 负责人:
      MAKABE Toshiaki
    • 依托单位:
    Hybrid-Optimal Control of Reactive Low frequency Discharge plasmas
    海外基金