Development of a Numerical-clean-room-method, which is useful to control contaminate and arrange industrial machines in clean room

本文提出了一种洁净室数值模拟方法，用于控制洁净室内的空气流动和污染场，以及工业机器在洁净室中的布置，并将数值模拟结果与大量的洁净室实验数据进行了比较，证明了该方法的有效性。该方法为洁净室和送排风管道内的整体流场和扩散场的预测提供了一种工具。该方法以湍流数值模拟方法为基础，能够预测送风口和排风口位置、风量、压力波动、大流动障碍物（工业机器和工人）、小流动障碍物（格栅地板、冲压金属板和机器的不平整度）以及各种影响室内流场的因素对室内流场的影响。由于该方法与本课题组提出的通风有效率比相结合，对不同类型洁净室的污染物扩散场进行了研究。我们从这些调查中获得了许多有用的数据，我们可以证实这个模型的准确性和实用性。

A numerical-clean-room-method is developed to control air flow and contaminate field in clean room, and to arrange industrial machines in clean room.Comparing the results of numerical simulation with many experimental data in clean room, this method is developed. This method is a tool for predicting totally flow and diffusion field in clean room and supply and exhaust duct. This method is depend on numerical turbulent simulation method and have an ability to predict flow field affected by the position of supply and exhaust openings, air volume, fluctuation of pressure, large flow obstacles (industrial machines and workers), small flow obstacles (gratings floor, punching metal boards and unevenness of machines ) and every factors which effect on flow field in room. As this method is used with ventilation efficiency rate, which is developed by our research group before, contaminate diffusion field in many different type of clean room is investigated. We have many useful data from these investigations and we can confirm the accuracy and the usefulness of this model.