Multiaxis Nanofabrication Machine

伊尔梅瑙工业大学成立的“基于尖端和激光的扩展宏观工作区域三维纳米加工（NanoFab）”研究培训小组在先进纳米加工技术与纳米定位和纳米测量机（NPMM）的协同结合的基础研究的第一个应用阶段取得了优异的成果。特别是，将NPMM扩展两个旋转自由度的研究工作，以及与共聚焦微传感器相结合的第一个5轴NPMM演示器和纳米压印模块的初步实现结果显示了巨大的潜力。转移项目的目的是在一个多轴纳米加工机器的新原型中实施研究培训小组所展示的概念验证，该机器具有显著提高的计量性能，并与应用合作伙伴一起进行测试。这是为了演示解决高精度测量的主要计量问题，特别是精密光学表面，如球面和自由曲面。对于目前的研究训练组来说，这也提供了在这种表面上显著推进纳米制造的可能性。该方法的核心是将带半反射镜的两轴旋转运动学和集成三轴微干涉仪与新型四面体纳米定位和纳米测量机相结合，以及集成各种纳米探针传感器或纳米工具的可能性。

The Research Training Group "Tip- and laser-based 3D nanofabrication in extended macroscopic working areas (NanoFab)" established at TU Ilmenau has achieved excellent results in its first application phase in basic research on the synergetic combination of advanced nanofabrication techniques with the outstanding capabilities of nanopositioning and nanomeasuring machines (NPMM). In particular, the research work on expanding the NPMM by two additional rotational degrees of freedom to a first 5-axis NPMM demonstrator combined with a confocal micro-sensor and the first results of the implementation of a nanoimprint mod-ule show the great potential. The aim of the transfer project is to implement the proof-of-con-cept shown in the Research Training Group in a new prototype of a multi-axis nanofabrication machine with significantly increased metrological properties and to test it together with the ap-plication partner. This is intended to demonstrate the solution to a major metrological problem of high-precision measurement, especially of precision optical surfaces such as aspheres and free-form surfaces. For the current Research Training Group, this also offers the possibility of significantly advancing nanofabrication on such surfaces. At the centre of the novel approach is the combination of a two-axis rotation kinematics with hemisphere mirror and integrated 3-axis microinterferometer with a new tetrahedron nanopositioning and nanomeasuring machine and the possibility of integrating various nanoprobe sensors or nanotools.