Traceable tactile, active, force and torque measuring coordinate measuring system sensor head

可追溯的触觉、主动、力和扭矩测量坐标测量系统传感器头

• 批准号: 505063926
• 负责人: Professor Dr.-Ing. Thomas Fröhlich
• 金额: --
• 依托单位: Institut für Prozessmess- und Sensortechnik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/505063926?language=en
• 关键词: Traceable; tactile; active; force; torque

The planned project involves the conception and design, the realisation and verification of a novel tactile, active, force and torque measuring coordinate measuring system-measuring head as well as accompanying fundamental investigations including the traceability of the measurement of the probing force and deflection of the stylus. The innovations of measuring head are the omission of elastic spring systems and the levitation of the probe, the probing force generation completely with Lorentz forces, the in situ force calibration according to the Kibble principle as well as the special arrangement of the actuators as parallel kinematics and of the position sensors as parallel metrology. In addition to the position and force measurement, the additional measurement of the orientation and occurring torques at the stylus changing plate should enable the investigation of new correction approaches to reduce the measurement uncertainty for measurements with projecting and long styli. The shortened traceability of the force and torque measurement and the intended low measurement uncertainty of the probing force should allow to vary the probing force over several orders of magnitude in a targeted way with new probing strategies to be developed. On the one hand, this should enable a significant reduction of the minimum probing sphere diameter and accurate measurements of objects made of aluminium or plastic as well as with sensitive surfaces in conventional coordinate measuring machines on the other hand. The generation and traceable measurement of probing forces up to 2 N with uncertainties of 20 micro N + measured value·0.0001 as well as the calibration of the probing forces without additional, external force calibration devices shall be made possible. The changing plate with stylus is to be coupled to a levitating flotor (derived from fly and rotor) and its position and orientation controlled using the signals from three 2D optoelectronic position sensors to be researched as parallel metrology and at least six voice coil actuators as parallel kinematics. The actuators serve both to maintain the levitation state of the flotor and to measure the forces and torques acting on the stylus and the levitating flotor, which occur in case of a probing or scanning on a measuring object surface. The primary measurement of the probing force according to the Kibble principle enables traceability to fundamental constants in accordance to the new SI system of units, valid since May 2019. The traceability of the measurement of the position and orientation shall be done via the primary laser interferometric length measurement of the coordinate measuring system used for the investigations and displacement calibration. Special challenges are posed to the measurement data acquisition and controller concept in order to keep the flotor in equilibrium of forces and torques, even during probing, and to be able to perform open-loop, closed-loop and free-form scans.

计划中的项目包括概念和设计、实现和验证一种新型的触觉、主动、力和扭矩测量坐标测量系统——测量头，以及伴随的基础研究，包括测量探测力和触控笔挠度的可追溯性。测量头的创新之处在于：省去了弹性弹簧系统和测头的悬浮，测头力完全由洛伦兹力产生，根据基布尔原理进行原位力校准，以及执行机构作为并联运动学和位置传感器作为并联计量的特殊安排。除了位置和力的测量之外，在触控笔更换板上的方向和发生的扭矩的额外测量应该能够研究新的校正方法，以减少使用突出和长触控笔测量的测量不确定度。力和扭矩测量的可追溯性缩短，探测力的测量不确定度较低，应允许有针对性地改变几个数量级的探测力，并开发新的探测策略。一方面，这应该能够大大减少最小探测球体直径和精确测量由铝或塑料制成的物体，以及在传统的坐标测量机敏感的表面。探测力的产生和可追溯测量高达2n，不确定度为20微N +测量值·0.0001，以及探测力的校准，不需要额外的外力校准装置。带触控笔的变换板将与一个悬浮的浮板（由飞盘和旋翼衍生而来）耦合，其位置和方向由三个二维光电位置传感器作为并联测量和至少六个音圈驱动器作为并联运动学来控制。致动器的作用是维持浮板的悬浮状态，并测量作用在触控笔和悬浮浮板上的力和扭矩，这些力和扭矩是在探测或扫描测量物体表面时发生的。根据基布尔原理对探测力进行初步测量，可以根据2019年5月起生效的新SI单位制追踪基本常数。位置和方位测量的可追溯性应通过用于调查和位移校准的坐标测量系统的初级激光干涉长度测量来完成。测量数据采集和控制器概念提出了特殊的挑战，以保持底板在力和扭矩的平衡，即使在探测过程中，并且能够执行开环，闭环和自由形式扫描。