Traceable tactile, active, force and torque measuring coordinate measuring system sensor head

计划中的项目涉及一种新型触觉、主动、力和扭矩测量坐标测量系统-测量头的概念和设计、实现和验证，以及相关的基础研究，包括探针力和偏转测量的可追溯性。测量头的创新之处在于省略了弹性弹簧系统和探针悬浮，完全利用洛伦兹力产生探测力，根据Kibble原理进行现场力校准，以及作为并联运动学的致动器和作为并联计量学的位置传感器的特殊布置。除了位置和力的测量外，在触针更换板处的方向和发生的扭矩的附加测量应能够研究新的校正方法，以减少使用突出和长触针进行测量的测量不确定性。力和扭矩测量的缩短的可追溯性以及探测力的预期低测量不确定性应允许以有针对性的方式在几个数量级上改变探测力，并开发新的探测策略。一方面，这可以显著减小最小探测球直径，另一方面，可以精确测量铝或塑料制成的物体以及传统坐标测量机中的敏感表面。应能够产生和可追溯测量高达2 N的探测力，不确定度为20 μ N +测量值·0.0001，以及在没有额外外力校准装置的情况下校准探测力。带有触针的更换板将耦合到悬浮浮子（源自飞片和转子），并使用来自三个2D光电位置传感器的信号控制其位置和方向，以研究并行计量学和至少六个音圈执行器作为并行运动学。致动器既用于保持浮子的悬浮状态，又用于测量作用在触针和悬浮浮子上的力和扭矩，这在探测或扫描测量对象表面的情况下发生。根据Kibble原理对探测力进行初步测量，可根据新的SI单位制追溯基本常数，自2019年5月起生效。位置和方向测量的可追溯性应通过用于调查和位移校准的坐标测量系统的主要激光干涉长度测量完成。测量数据采集和控制器概念面临着特殊的挑战，以便即使在探测期间也能保持浮子的力和扭矩平衡，并能够执行开环、闭环和自由形式扫描。

The planned project involves the conception and design, the realisation and verification of a novel tactile, active, force and torque measuring coordinate measuring system-measuring head as well as accompanying fundamental investigations including the traceability of the measurement of the probing force and deflection of the stylus. The innovations of measuring head are the omission of elastic spring systems and the levitation of the probe, the probing force generation completely with Lorentz forces, the in situ force calibration according to the Kibble principle as well as the special arrangement of the actuators as parallel kinematics and of the position sensors as parallel metrology. In addition to the position and force measurement, the additional measurement of the orientation and occurring torques at the stylus changing plate should enable the investigation of new correction approaches to reduce the measurement uncertainty for measurements with projecting and long styli. The shortened traceability of the force and torque measurement and the intended low measurement uncertainty of the probing force should allow to vary the probing force over several orders of magnitude in a targeted way with new probing strategies to be developed. On the one hand, this should enable a significant reduction of the minimum probing sphere diameter and accurate measurements of objects made of aluminium or plastic as well as with sensitive surfaces in conventional coordinate measuring machines on the other hand. The generation and traceable measurement of probing forces up to 2 N with uncertainties of 20 micro N + measured value·0.0001 as well as the calibration of the probing forces without additional, external force calibration devices shall be made possible. The changing plate with stylus is to be coupled to a levitating flotor (derived from fly and rotor) and its position and orientation controlled using the signals from three 2D optoelectronic position sensors to be researched as parallel metrology and at least six voice coil actuators as parallel kinematics. The actuators serve both to maintain the levitation state of the flotor and to measure the forces and torques acting on the stylus and the levitating flotor, which occur in case of a probing or scanning on a measuring object surface. The primary measurement of the probing force according to the Kibble principle enables traceability to fundamental constants in accordance to the new SI system of units, valid since May 2019. The traceability of the measurement of the position and orientation shall be done via the primary laser interferometric length measurement of the coordinate measuring system used for the investigations and displacement calibration. Special challenges are posed to the measurement data acquisition and controller concept in order to keep the flotor in equilibrium of forces and torques, even during probing, and to be able to perform open-loop, closed-loop and free-form scans.