Development of Deposition System of Size-Controlled Clusters

本研究的目的是构建一个质量选择金属团簇的沉积系统。结果总结如下：1)团簇沉积体系的构建图1示意性地构建了团簇沉积体系。该系统由场离子源、簇束源、四极质谱计、离子探测系统和差动泵浦系统组成。整个系统是由不锈钢制成的，因此可以烘焙。2)锂和锌团簇的场离子质谱学沉积质量选择的金属团簇的前提是探测它们的场离子。因此，使用所构建的系统对Li和Zn团簇进行了场离子质谱分析。关键的结果是愚蠢的。1)Li_3被认为是被禁止的团簇，被证实参与了Li团簇的蒸气。2)锌的强度分布不能反映锌同位素的相对丰度，说明二聚体的形成具有同位素组合的选择性。3)锌二聚体的沉积成功地在环氧膜上沉积了二聚体。锌薄膜是非晶态的，因此在结构上不同于通常具有多晶或单晶结构的单体锌薄膜。因此，质量选择团簇沉积有望提供具有新颖结构的金属薄膜。

The aim of this study was to construct a deposition system of mass-selected metal clusters. The results obtained are summarized as floows.1) Construction of cluster-deposition systemThe cluster-deposition system schematically shown in Fig. 1 was constructed. The system is comprised of field ion source, cluster-beam source, quadrupole mass spectrometer, ion detection system and differential pumping system. The entire system is made of stainless stell, thus being bakable.2) Field Ion Mass spectrometry of Li and Zn clustersThe prerequisite for depositing mass-selected metal clusters is to detect their field ions. Field ion mass spectrometry was therefore attempted for Li and Zn clusters, using the system constructed. The key results were as foolows. 1) Li_3, which is thought to be forbidden cluster, was confirmed to be involved in Li cluster vapors. 2) The intensity distribution of Zn_2 did not reflect the relative abundance of Zn isotopes, suggesting a selectivity of isotope combination in dimer formmation.3) Deposition of Zn dimer filmsZn dimers were successfully deposit on epoxy films. Zn film was amorphous, and thus differed structually from monomer Zn films which usually possess a poly- or monocrystalline structure. Mass-selected cluster deposition is thus expected to provide metal films with novel structure.