DEVELOPMENTAL SCIENTIFIC RESEARCH ON X-RAY SPECTROSCOPIC SCATTERING TOPOGRAPHY
DEVELOPMENTAL SCIENTIFIC RESEARCH ON X-RAY SPECTROSCOPIC SCATTERING TOPOGRAPHY
批准号:
04558016
负责人:
CHIKAURA Yoshinori
金额:
$10.05万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Developmental Scientific Research (B)
财政年份:
1992
资助国家:
日本
项目状态:
已结题
起止时间:
1992 至 1994
中文摘要
本研究有两个主要目的;x射线散射地形学的发展,包括局部光谱学和提高空间分辨率的仪器研究。在第一个方面,描述了使用多通道探测器作为位置敏感探测器和能量色散固体探测器的x射线散射形貌。该系统包括在每个地方测量x射线光谱。新形貌体系为本文作者提出的x射线散射形貌增加了另一个维度。它产生具有某些物理量的地形图,例如晶体取向,以及通常集成的强度图。本文研究了Fe=3%Si合金单晶的取向形貌、人体胆石的结构观察和非晶橡胶轮胎的无损检测。重点放在x射线光谱形貌的第一个比例上。研究的第二个方面是提高空间分辨率的仪器。虽然空间分辨率是决定x射线形貌功能最重要的因素,但近30年来,尽管材料科学对高分辨率形貌的要求越来越高,但空间分辨率并没有得到提高。使用微光束的x射线散射形貌是一种能够克服这一分辨率问题的方法。由于使用自动关闭管的仪器的最大分辨率限制在20 μ m,我们设计并制造了使用同步辐射微束的散射地形设备。实验中,狭缝系统形成了直径为7mum的微束。作为测试材料,我们观察到纤维素在竹子中的分布。当扫描步长为2mum时,我们获得的空间分辨率小于5mum。
英文摘要
This research has two main aims ; development of X-ray scattering topography involving local spectroscopy and instrumentational research for improving the spatial resolution.As to the first aspect, X-ray scattering topography using multichannel detectors as a position sensitive detector and a energy dispersive solid state detector is described. The system involves measuring the X-ray spectrum at each local place. The new topography system adds another dimension to X-ray scattering topography proposed by the present authors. It produces topographs constructed with certain physical quantities, such as crystal orientatin, as well as an ordinaly integrated intensity map. Included in the paper is the orientation topography for an Fe=3%Si alloy single crystal, structural observation of a human chololith and the non-destructive testing of a amorphous rubber tire. Emphasis is placed on the first proporsal of X-ray spectroscopic topography.The second aspect of the research is instrumentations for improving spatial resolution. Although spatial resolution is the most essential factor determining the function of X-ray topography, it has not been improved in 30 years in spite of increasing requirement for highly-resolvable topography in materials science. X-ray scattering topography using a microbeam is a method capable of overcomimg this resolution problem. Becouse the maximum resolution of an apparatus using a seled-off tube is limited to 20 mum, we designed and constructed scattering topography equipment using a synchrotron radiation microbeam. In the experiment, the slit system forms the microbeam 7mum in diameter. We observed a cellulose distribution in bamboo as a testing material. When the scanning step was 2mum, we attained spatial resolution less than 5mum.
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Yosifumi Suzuki, Yoshinori Chikaur and Hideki Kii: "X-Ray Scattering Topographic Study of Lattice-mismatched Compound Semiconductor Heteroepitaxial Layrs" J.Phys.D : Appl.Phys.26. 86-91 (1993)
Yosifumi Suzuki、Yoshinori Chikaur 和 Hideki Kii:“晶格失配化合物半导体异质外延层的 X 射线散射形貌研究”J.Phys.D:Appl.Phys.26。
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Yoshinori Chikaura, Yoshifumi Suzuki and Yoshitake Udagawa: "X-Ray Scattering Topography involving Local Spectroscopy" J.Phys.D : Appl.Phys. 26. 2212-2218 (1993)
Yoshinori Chikaura、Yoshifumi Suzuki 和 Yoshitake Udakawa:“涉及局部光谱学的 X 射线散射形貌” J.Phys.D :Appl.Phys。
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通讯作者:
Takeo Hondoh, Tetsuya Ishikawa, Yoshinori Chikaura, Osamu Nittono and Satosi Iida: "X-ray topography" SPring-8 Project Nol(Scientific Program 1993). 119-128 (1993)
Takeo Hondoh、Tetsuya Ishikawa、Yoshinori Chikaura、Osamu Nittono 和 Satosi Iida:“X 射线地形学”SPring-8 项目 Nol(科学计划 1993)。
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近浦吉則ら: "理工学基礎課程 物理学実験" 東京教学社, 234 (1994)
近浦义典等:《理工基础课物理实验》东京京学社,234(1994)
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Y. Suzuki, Y. Chikaura, M. Imai: "Laue-Case Plane Wave Topography using Synchrotron Radiation to Reveal Microdefects in a thinned Silicon Crystal" Jpn. J. Appl. Phys.32. L958-961 (1993)
Y. Suzuki、Y. Chikaura、M. Imai:“使用同步辐射的劳厄案例平面波形貌术揭示薄硅晶体中的微缺陷”Jpn。
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共 24 条
Advanced Formation Technique of High Energy Parallel Synchrotron Microbeam with white Spectrum, and its Application to Visualization of Internal Structure of Electronic Devices and Biomaterials
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批准号:16360012
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$8.0万
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财政年份:2004
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负责人:CHIKAURA Yoshinori
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依托单位:
Formation of High energy White Synchrotron Microbeam and its Application to Micro-Imaging of Electronic Devices
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批准号:14550012
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项目类别:Grant-in-Aid for Scientific Research (C)
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资助金额:$2.24万
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财政年份:2002
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负责人:CHIKAURA Yoshinori
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依托单位:
Formation of High energy white and parallel microbeam and its application to Surface Spectro-Scattering Topography
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批准号:11650019
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项目类别:Grant-in-Aid for Scientific Research (C)
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资助金额:$2.37万
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财政年份:1999
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负责人:CHIKAURA Yoshinori
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依托单位:
Trial Construction of Scattering Radiographic Apparatus and its Application to observation of Microdefectsin Silicon using Synchrotron X-Radiation
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批准号:62580041
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项目类别:Grant-in-Aid for General Scientific Research (C)
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资助金额:$1.6万
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财政年份:1987
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负责人:CHIKAURA Yoshinori
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依托单位:
海外基金