Development of a contact type soft X-ray microscope with variable wavelength

本课题的目的是研制一种接触式软x射线显微镜，用于观察精细的活体生物样品。在软x射线显微镜下，研究了激光产生的等离子体和同步轨道辐射的来源。在这个项目中，我们采用Z-pinch等离子体设备作为软x射线源，因为它易于操作，x射线产生效率高，波长的可变性和低成本的建设。主要结果如下：(1)研制了一种等离子体聚焦装置，在该装置中安装了用于附加高Z气体膨化的快速作用阀，并生产了N、C、O、Ne、Ar或Al等各种高离子级的等离子体，如氢、氦和锂。等离子体密度和温度分别为10^<20> /cm^3 ~ 10^<21>/cm^3和数keV。(2)提出了成像光谱仪、定量评价软x射线强度的针孔相机、分幅和条纹模式的新型x射线成像系统等诊断方法。(3)利用这些诊断工具对等离子体聚焦装置产生的软x射线进行了表征。软x射线生成的再现性也进行了检查。(4)对软x射线的滤光片和光阻剂的特性进行了实验和理论研究。(5)根据诊断获得的信息，我们构建了软x射线显微镜系统并对其性能进行了测试。该系统是用生物样本、蜻蜓翅膀上生长的细须和酵母来检验的。用原子力显微镜观察光刻胶上转录的图案。该系统的空间分辨率为0.2 μ m， x射线源为-4* Ar k线，光刻胶为PMMA。

The purpose of this project is to develop a cotact type soft x-ray microscope for observing fine alive biological samples. The laser produced plasma and the synchrotron orbit radiation have been considered for sources in the soft x-ray microscope. In this project we employed a Z-pinch plasma facility as the soft X-ray source because of its easy handing, high efficiency of the X-ray production, variability of the wave length and low cost in construction.Main results are followings ;(1) A plasma focus facility in which a fast acting valve for additional high Z gas puffing was mounted was developed, and plasmas of various high ion stage such as hydrogen-, helium-and lithium-like of N,C,O,Ne, Ar or Al were produced. The plasma density and temperature were 10^<20>-10^<21>/cm^3 and several keV,respectively.(2) Diagnostic methods such as an imaging spectrometer, a pinhole camera which enabled to evaluate the soft x-ray intensity quantitatively, a new concept x-ray imaging system in framing and in streak mode were developed.(3) Using those diagnostic tools, characterization of the soft x-rays generated by the plasma focus facility was carried out. Reproducibility of the soft x-ray generation was also examined.(4) Characteristics of filters and photoresists for the soft x-rays were surveyed experimentally and theoretically.(5) Based on information obtained with the diagnostics, we constructed a soft x-ray microscope system and examined its performance.(6) The system was examined using a biological samples, a fine whisker grown on the dragonfly's wing and yeast. The transcribed pattern on the photoresist was observed with an atomic force microscope. The spatial resolution of the system is 0.2 mu m Ar K-lines (-4*) as an the x-ray source and PMMA as the photoresist were employed.