DEVELOPMENT OF AN ION MICROPROBE USING HIGH ENERGY ION BEAM

我们开发了一种新的质子微探针样品室，用于分析非均相矿物样品。样品室配备了新颖的光束和样品光学元件、计算机驱动工作台和外部显微镜和滤光片交换系统。在所采用的光学几何结构下，光束和样品光学的轴是共线的，并且垂直于样品表面，这是允许分析的高空间分辨率和精确的微米级样品和光束定位的基本方面。使用长工作距离和集成反射镜是成功开发所满足的主要设计限制。在测量的基础上，所提出的质子微探针有望加强需要有效和容易地进行非破坏性矿物微分析的研究。

We have developed a newly proton microprobe sample chamber designed for analysis of heterogeneous mineral samples. The sample chamber is equipped with a novel beam and sample optics, a computer-driven stage and external microscope and filter exchange system. Under the employed optical geometry, axs of beam and sample optics are collinear and normal to the sample surface, an essential aspect allowing high spatial resolution of analyzes and accurate, micrometer-scale sample and beam positioning. Use of a long working distance in conjunction with integral reflectance mirror are the primary design constraints satisfied for successful development. Based on measurements, the presented proton microprobe is expected to enhance studies requiring effective and easy to perform nondestructive microanalytical analysis of minerals.