Development of photomechanical sensor for measurement of deposition thickness using optical fiber

（1）Fundamental experiments on Au or Ag deposition··The resonance frequencies were measured as a function of the deposition thickness of Au and Ag using a quartz core microcantilever fabricated from an optical fiber in an ion sputtering apparatus。共振频率单方面地减少了，在沉积物和银沉积物中沉积物的厚度增加了。金属沉积的降解率约为0.015%/ nm，银沉积约为0.009%/nm。实验价值观和计算价值观的总体趋势将其与理论相关的柔性振动与一个圆柱形复合体的光束是类似的。1.Effects of cantilever size.（效果of cantilever size were discussed）共振频率的沉积厚度依赖性已被测量到三个坎迪利弗的长度不同，几乎相同的直径。其共振频率变化的相对比率不取决于他们的坎蒂利弗的长度。对沉积物的准确性的测量 ... More 厚度是由共振频率的产品及其相对速率来决定的，因此，罐头车的长度应该在订单中缩短，以获得更好的准确性。（3）Cantilever的共振频率的自动测量......共振频率的分散程度约为80%。并且需要时间来衡量，以与格式方式比较。（4）安装在FC连接器上的微球透镜的薄玻璃振动器对沉积厚度的测量;和安装在带有微球透镜的PC连接器顶端的铬和Au。共振频率是沉积物厚度的一个功能，可以在没有光学调整的情况下测量。具有5 mm in length、2 mm in width和135 mu m in thickness decreased 37 Hz from 3. 28 kHz during deposition of Au5OOnm。该地区的共振频率转换平均为0.0741 Hz/nm。（5）对某些沉积材料的沉积厚度测量与接近相同大小的四芯在具有较高密度的情况下，使用了较大的共振频率转换。共振频率的变化几乎完全是由于只增加了坎蒂利弗的附加质量，而不是储存材料的弹性。Less（低）

(1)Fundamental experiments on Au or Ag deposition・・・The resonance frequencies were measured as a function of the deposition thickness of Au and Ag using a quartz core microcantilever fabricated from an optical fiber in an ion sputtering apparatus. The resonance frequencies monotonously decreased with increase in deposition thickness in both Au deposition and Ag deposition. The rates of decrease were about 0.015% / nm in Au deposition and about 0.009%/nm in Ag deposition. Overall tendencies of experimental values and calculated values applying the theory related to the flexural vibration of a cylindrical composite beam were similar.(2)Effects of cantilever size・・・Effects of cantilever size were discussed. Deposition thickness dependence of resonance frequency was measured on three cantilevers with different length and almost the same diameter. Relative rates of resonance frequency shifts of them didn't depend on the length of their cantilevers. Since measurement accuracy for deposition … More thickness is determined by a product of resonance frequency and its relative rate, the length of the cantilever should be shorter in order to obtain a better accuracy.(3)Automatic measurement of resonance frequency of the cantilever・・・Automatic measurement of resonance frequency of the cantilever was tried using personal computer which controled the frequency for excitation the cantilever and input vibrating signal. The scattering of resonance frequencies became about 80%. and time required for measurement became shorter compared with former way.(4)Measurement of deposition thickness by thin glass vibrator installed with micro-ball lens in FC connector・・Thin glass vibrator deposited Cr and Au was fixed at the tip of PC connector with micro-ball lensin. The resonance frequency as a function of depositon thickness could measured without optical adjustments. Resonance frequency of the glass vibrator with 5mm in length, 2mm in width and 135 mu m in thickness decreased 37Hz from 3.28kHz during deposition of Au 5OOnm. The average rate of resonance frequency shifts was 0.0741Hz/nm in the region.(5)Deposition thickness measurements for some deposition materialsResonance frequencies of quartz core cantilevers with almost same size (30mu m in diameter and 2.2mm in length, resonance frequency before deposition was about 5kHz) were measured with deposition thickness of Au, Ag, Mo and Cr. Bigger resonance frequency shift was obtained in case of deposition material with higher density. Resonance frequency shifts were almost caused by only increace in additional mass of the cantilever not the elasticity of deposition materials. Less