Development and application of atmospheric pressure cold plasma polymerization for surface treatment of polymer

我们已经开发了多种类型的等离子体发生器，以使等离子体处理在大气压力下的低气体温度。淋浴型等离子体发生器发现，可以给气体温度比其他的要低得多，但与一个宽加工区结合在一起。它由射频（13.56 MHz）铝阴极盘组成，通过一个小洞，使等离子体气体流入阴极和一个接地阳极板之间的空间。由于射频电压的应用到阴极，同源等离子体在大气压力下产生，气体通过空间（1- 2.5毫米高）在两个电极之间。当他的气体流动在工程上被彻底地改变为空气时，等离子体也可能产生。我们引入了脉冲的功能，其中射频功率在短时间内启动和关闭，以产生等离子体的气体温度，并进一步控制反应。这种淋浴型等离子体的气体温度低于100℃，表明这种等离子体的一个非常柔软的特性，我们开发了一个组合系统，以有效地处理各种等离子体条件下聚合物薄膜的表面。The polymer film is fed to the plasma area defined by a slit mask in a stepwise mode under the conditions controlled synchronously with the film movement.等离子体聚合和复制与CO-D22-D2 were investigated using such monomers as methane， butadiene， benzene， xylene， and styrene。这部薄薄的电影是从所有这些电影中储存的。Thin films which deposited by mixing CO-D22 gas showed an absorption of carbonyl group in FT-IR spectra and it was confirmed that CO-D22 in corporation as ester or carboxylic acid increased remarkably by switching the plasma generation from CW to pulse mode。

We have developed severed types of plasma generators to enable plasma processing at low gas temperatures under atmospheric pressure. The shower type plasma generator was found to give gas temperatures much lower than the others, together with a wide processing area. It is composed of an rf (13.56MHz) aluminum cathode disk with small holes through which plasma gas flows into the space between the cathode and a grounded anode plate. By the application of rf voltage to the cathode, homogeneous plasma was generated in an atmospheric pressure He gas flow through the space (1-2.5mm high) between the both electrodes. Ar plasma could also be generated when He gas flow was gradually exchanged to Ar. We introduced a function of pulse which turns on and off an rf power in short time to make gas temperature of plasma and to advance and control a reaction. The gas temperature of this shower type plasma turned out to be less than 100℃, indicating a very soft nature of this plasma.We developed a combinatorial system to treat a surface of polymer film under various plasma conditions efficiently. The polymer film is fed to the plasma area defined by a slit mask in a stepwise mode under the conditions controlled synchronously with the film movement.Plasma polymerization and copolymerization with COィイD22ィエD2 were investigated using such monomers as methane, butadiene, benzene, xylene, and styrene. Thin films were deposited from all of those monomers. Thin films which deposited by mixing COィイD22ィエD2 gas showed an absorption of carbonyl group in FT-IR spectra and it was confirmed that COィイD22ィエD2 in corporation as ester or carboxylic acid increased remarkably by switching the plasma generation from CW to pulse mode.