Cylindricity Measurement System by Optical V-block Method

研制了光学V形块法圆度测量系统。该系统采用透射激光功率检测技术，可作为在线测量系统。此外，还阐明了圆柱度测量系统的可行性。该纲要说明如下。圆度测量系统（1）将机械V形块法圆度测量改进为光学V形块法在被测截面上的完全非接触测量。通过这种改进，除了支撑横截面外，横截面上的圆度测量成为可能。(2)针对光学V形块法切向位移传感器，给出了圆度测量中几何误差的模拟理论。结果，测量误差为2%或更小。(3)将研制的系统测量结果与市售光学圆度仪测量结果进行比较，圆度误差在0.5 μm以内。(4)所开发的系统需要15秒的短测量时间，并且被测气缸的安装/拆卸也很容易。因此，可以将开发的系统带入自动化生产线。(5)所开发的系统可以测量和补偿旋转误差。虽然所研制的系统回转误差较大，但通过补偿实现了高精度的圆度测量.圆柱度测量系统（1）给出了光学V形块法测量圆柱度的理论公式。(2)通过光学V形块沿着被测圆柱轴向平行移动，实现了多截面圆度测量。(3)通过了解多个被测截面形状的位置关系，圆柱度测量成为可能。

The roundness measurement system by optical V-block method was developed. This system applies a detection technique of the transmitted laser beam power and can be used as in-process measurement system. In addition, the feasibility of cylindricity measurement system was clarified. The outline is described in the following.1. The roundness measurement system(1) Roundness measurement by mechanical V-block method was improved into perfectly noncontact measurement on the measured cross section by optical V-block method. By this improvement, the roundness measurement in the cross section except for support cross section became possible.(2) On tangent style displacement sensor for optical V-block method, the theory for simulating the geometric error in the roundness measurement was shown. As a result, the measurement error was 2% or less.(3) In comparison with measurement result by developed system and one by optical roundness measuring instrument of marketing, the difference of roundness was within 0.5 μm.(4) The developed system requires short measuring time of 15 seconds and mounting/dismounting of measured cylinder is also easy. Therefore it is possible to take the developed system into the automated manufacturing line.(5) Measurement and compensation of the rotation error are possible for the developed system. Though rotation error of the developed system was large, roundness measurement was achieved with high accuracy by compensation.2. Cylindricity measurement system(1) The theoretical formula for expanding the optical V-block method for the cylindricity measurement was shown.(2) By parallel movement of the optical V-block along axial direction of measured cylinder, the roundness measurement in multiple cross sections became possible.(3) By knowing the positional relation of multiple cross-sectional shape measured, the cylindricity measurement became possible.