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Optical measurement system of radial-, axial- and angular-motion error for small diameter cylinder utilizing SLD

利用SLD的小直径圆柱体径向、轴向和角运动误差光学测量系统

基本信息

批准号：
15560109
负责人：
YAMADA Ryuichi
金额：
$ 1.47万
依托单位：
Nagaoka National College of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2003
资助国家：
日本
起止时间：
2003 至 2004
项目状态：
已结题

项目摘要

The run-out error measurement system of three dimensions using optical virtual V-block method was developed. In the first, the method for eliminating the influence of the feature error of the measured object from measured value that used optical virtual V-block method and the measurement method of the tilt error motion ware shown. Then, the method for separating the spindle run-out error by eccentricity and tilt of the measured object war separated from the measured value was shown. Based on these theories the run-out error measurement system has been designed. The measurement system is composed of the two measuring plane and the signal processor. In the measuring plane the three displacement sensors utilizing transmitted light method are mounted. The radial error motion at two sections was measured with this device. Then the run-out error of three dimensions was calculated. To estimate the run-out error within 50UPR, the best values of included angle and tilt angle that decides the performance in optical virtual V-block method were determined. Therefore they were =55° and =12°.The perform ance of the developed measurement system was evaluated. As a result, static stability is ±0.67 m in the upper measurement plane and ±0.92 m in the lower measurement plane. There was little influence of the ambient light. The spindle run-out error was measured on machine with this system. Moreover, the measured result by two-probe method with capacitance displacement sensor was compared with the result by the developed system. In the measurement of two-probe method, the measurement accuracy was not enough because of the feature error of the measured object. The run-out error with developed system could not be measured because of poor measurement accuracy of the displacement sensor. To the measure the spindle run-out error on the actual machine tool, the improvement of measurement accuracy of the displacement sensor should be needed.

研制了光学虚拟V形块法三维跳动误差测量系统。首先介绍了用光学虚拟V形块法从测量值中消除被测物体特征误差影响的方法和倾斜误差运动的测量方法。提出了从测量值中分离出被测物偏心和倾斜量来分离主轴跳动误差的方法。在此基础上设计了跳动误差测量系统。测量系统由两个测量平面和信号处理器组成。在测量平面上安装了三个透射光法位移传感器。用该装置测量了两个截面的径向误差运动。然后计算了三维跳动误差。为了使跳动误差在50 UPR以内，确定了决定光学虚拟V形块法性能的夹角和倾角的最佳值。因此，它们分别为=55°和=12°。因此，静态稳定性在上测量平面为±0.67 m，在下测量平面为±0.92 m。环境光的影响很小。利用该系统在机床上对主轴跳动误差进行了测量。并将电容位移传感器双探针法的测量结果与所研制的系统的测量结果进行了比较。在双探针法测量中，由于被测物体的特征误差，测量精度不够。由于位移传感器的测量精度差，无法测量所开发系统的跳动误差。为了在实际机床上测量主轴跳动误差，需要提高位移传感器的测量精度。