Study on High-Integrated Three-Dimensional Micro Motion Convert Mechanisms

对于传统的微机械，特别是微动转换机构，当输入点沿相同方向移动时，机构的输出点可以水平移动。因此，我们提出了一种三维运动转换机制，当输入点在水平方向上移动时，输出点可以垂直移动。该机构由静电梳齿驱动器和大挠度弹性铰链机构组成。在这项研究中，所提出的机制的有效性和特点进行了理论和实验研究。然后利用微机械加工技术制造了机构和驱动器。从这项研究中获得的结果如下。(1)在机构数综合的基础上，引入二自由度五杆PRRRRP机构，采用大挠度弹性铰链代替转动副，设计了一种三维微运动转换机构， ...更多信息 提出了衬底平面作为指向平面外部的输出运动。并提出了与运动转换机构统一配置的静电梳齿驱动执行器。(2)通过运动转换机构，建立了基于大挠度弯曲理论的理论分析方程。建立了运动转换机构的宏模型，并进行了理论分析和实验研究。从而证实了理论方程的正确性。(3)理论分析表明，铰链尺寸和杆件厚度与杆件长度之比对输入输出位移关系的影响是独立的。并且，该比率是关于输入和输出力的特性的主要因素。(4)介绍了采用微机械加工技术，以聚酰亚胺为结构材料制作模型的工艺过程，并制作了几台利用上述理论设计的样机。(5)为了考虑使致动器统一设计的运动转换机制，我们决定使用聚酰亚胺，使静电梳状驱动致动器，然后，我们还提出了技术，其中沉积金属到表面上可以使致动器有可能静电驱动。然后，使用制造的致动器进行实验，施加的电压设置为80V，而此时的输出位移约为15.75微米。少

For conventional micromachines, in particular, micromotion convert mechanisms, the output points of the mechanism can move horizontally when input points move in the same direction. Therefore we proposed a three-dimensional motion convert mechanism whose output points can move vertically when the input points move in the horizontal direction. This mechanism consists of electrostatic comb-drive actuators and a mechanism with large-deflective elastic hinges. In this study, the validity and the characteristics of the proposed mechanism are investigated theoretically and experimentally. Then the mechanisms and actuators are manufactured by micromachinig technology. The results obtained from this study are as follows.(1) By introducing the 2-DOF 5-link PRRRRP mechanism based on the number synthesis of the mechanisms and by adopting large deflective elastic hinges instead of the revolute pair in the mechanism, a three-dimensional micro motion convert mechanism to take out the input motion in … More a substrate plane as the output motion directed to the outside of the plane was proposed. And, electrostatic comb-drive actuators uniformly deviced with the motion convert mechanisms are proposed too.(2) With the motion convert mechanism, a theoretical analysis equation based on the large deflective bending theory was introduced. Furthermore with a macromodel of the motion convert mechanism, theoretical analysis and experimental analysis were made. Thus propriety of the theoretical equation was confirmed.(3) It is clarified from the theoretical analysis that the relationship between input and output displacements are affected by the dimensions of the hinges and the ratio of the thickness of the link to the length of it independently. And, the ratio is the prime factor for the characteristics about the input and output forces.(4) The fabrication process for a model fabricated by using micromachinig technologies and polyimide as the structural material is introduced and several prototypes designed by using the above theory are manufactured.(5) To consider making an actuator uniformly devised with a motion convert mechanism, we decided to make an electrostatic comb-drive actuator using polyimide, and then, we also proposed the technique, in which depositing metals onto the surface can make it possible for an actuator to drive electrostatically. Then, conducting experiments using manufactured actuators, the applied voltage is set at 80V, while the output displacement at this time is about 15.75 micro-meters. Less