Formation of photo-thermoelectric energy conversion functional films by controlling film structure in nanometer scale.

在订购利用太阳能资源时，光-热电能转换功能性电影已被调查。该主题由两个功能部分组成，I.E.，（1） ：光-热能转换膜和（2） ：热电能转换膜。调查的目标是通过在电影中形成合适的中观结构来改善个人功能。（1） Ag/MgO和/或W-N/AlN multi-layer suutuctured films are formed by the sputtering method。随着Ag层厚度的增加，光学性能从表面-等离子体吸收中发生变化，以便通过条件吸收进入块状金属性能。当显示在红外区域的近红外区域相对较大的吸收率，如良好的可见光区域。功能分级的Ag/MgO电影是基于上述结果的。然后，87%的总太阳能吸收率得到了满足。同样的程序在W-N/AlN系统上运行。最终获得的功能分级的W-N/AlN电影显示了93%的总太阳能吸收率。（2） Sputtered Fe-Si films are annealed （853 K x2h） in a vacuum。电抵抗力的变化（α）和西贝克协同效应（α）得到了衡量。The film with a composition of FeSiイイD22イエD2 shows maximum values of Oracle and？。Multi-layered FeSi D22/C films are formed。因此，α的价值被成功地降低了，而α的价值也被降低了。这种力量因素并没有在一定程度上得到改善。分离的联合Sb电影也是制作的。通过退火，非晶结构膜将改变为具有纳米尺寸的聚晶体管结构的高密度空隙。Such a nano-void structure may to the reduction of thermal conductivity.It has been presented in this research that the introduction of the suitable mesoscopic structure into the intrinsic film structure is effective to improve the inherent function。因此，优化将是一个未来的问题。

In order to exploit solar energy resources, the photo-thermoelectric energy conversion functional films have been investigated. The subject has been composed of two functional parts, I.e., (1) : photo-thermal energy conversion films and (2) : thermoelectric energy conversion films. The aim of the investigation is to improve individual function by forming the suitable mesoscopic structure in the films.(1) Ag/MgO and/or W-N/AlN multi-layer sutuctured films are formed by the sputtering method. With increasing Ag layer thickness, the optical properties change from the surface-plasmon absorption due to fine particle into bulk metallic property via conductive absorption which shows relatively large absorbance in the near infrared region as well as visible light region. The functionally graded Ag/MgO film is formed based on the above results. Then the total solar energy absorbance of 87% is achieved. The same procedure is performed on the W-N/AlN system. The finally obtained functionally graded W-N/AlN film shows a total solar energy absorbance of 93%.(2) Sputtered Fe-Si films are annealed (853K x 2h) in a vacuum. The change of the electrical resistivity (ρ) and the Seebeck coefficient (α) are measured. The film with a composition of FeSiィイD22ィエD2 shows maximum values of ρ and α. The multi-layered FeSiィイD22ィエD2/C films are formed. The value of ρ is successfully reduced but the α is also reduced. The power factor is not improved consequently. The sputtered Co-Sb films are also formed. By annealing, the amorphous-structured films change into polycrystalline structure including high-density voids with nanometer size. Such a nano-void structure may contribute to the reduction of thermal conductivity.It has been presented in this research that the introduction of the suitable mesoscopic structures into the intrinsic film structure is effective to improve the inherent function. The performing the optimization will be a future problem.