Investigation of the formation process of transparent conductive film by using superheated steam and/or water plasma jet

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Reforming processes from metal film to hydroxide or oxide films by using superheated steam and/or atmospheric pressure water-plasma were investigated. The process of superheated steam was effective to promote dehydration or oxidation reaction. Homogeneous reforming on the surface was induced by scanning of a water-plasma plume. Transparent conductive film was successfully formed by hydrothermal reaction of Zn-Mg alloy film. As the conclusion, the hydrothermal treatment in the pure liquid water and subsequent reforming under the gaseous phases such as the superheated steam or the water-plasma were useful process for making the functional films.