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Control of magnetic properties of Invar alloy by using giant stress in thin films.

利用薄膜中的巨大应力控制因瓦合金的磁性能。

基本信息

批准号：
08650765
负责人：
ISHIGURO Takashi
金额：
$ 1.41万
依托单位：
Nagaoka University of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1996
资助国家：
日本
起止时间：
1996 至 1997
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08650765/
关键词：
Invar alloy Film stress Thin film growth Atomic magnetic moment Fe-Ni alloy Sputtered Mo film 膜応力原子磁気モーメントインバー磁性薄膜 Fe-Ni合金膜膜成長

项目摘要

Atomic magnetic moment depends on the atomic distance and/or crystalstructure. Based on this view point, the Fe-Ni alloy sputtered thin films have been investigated.As-deposited films on the glass substrates show the saturated magnetization expected from ideal alloy. The structure is, however, amorphous structure. After annealing, the structure changes into polycrystalline and saturation magnetization decreases. To obtain the f.c.c. crystalline phase in as-deposited state, Au under layr is adopted. Then, the f.c.c.phase is realized in a concentration range over the 30at%Ni. Based on this result, the Fe_<0.7>Ni_<0.3> films on the Au under layr are investigated. The atomic magnetic moment depends on the film thickness of Fe_<0.7>Ni_<0.3>. in a range less than 60nm. The crystal deformation is evaluated by using x-ray diffraction and transmission electron diffraction. Fe_<0.7>Ni_<0.3>/Au show the lattice deformation toward surface normal.On the other hand, to induce further lattice deformation on the Fe_<0.7>Ni_<0.3> films on Au under layrs, stacking of sputtered Mo layrs are examined. It is confirmed that the internal film stress of the Mo can be changed with working Ar gas pressure. In the case of Mo/Fe_<0.7>Ni_<0.3>/Au stacking structure, the lattice deformation takes place in both directions of the in-plane and surface normal direction.As the result, in the film of Fe_<0.7>Ni_<0.3> anisometric lattice deformation was observed by the stacking of Mo and/or Au layr. The corresponding atomic magnetic moment changes with the averaged lattice parameter. The trajectory of the change, however, depends on the lattice deformation.

原子磁矩取决于原子距离和/或晶体结构。基于这一观点，对Fe-Ni合金溅射薄膜进行了研究。在玻璃衬底上沉积的薄膜表现出理想合金所期望的饱和磁化。然而，这种结构是无定形结构。退火后结构变为多晶，饱和磁化强度降低。为了获得沉积态的氟氯化碳晶相，采用了金下层。然后，在超过30at%Ni的浓度范围内实现了fcc相。在此基础上，研究了层下Au表面的Fe_<0.7>Ni_<0.3>薄膜。原子磁矩取决于Fe_<0.7>和Ni_<0.3>的薄膜厚度。在小于60纳米的范围内。利用x射线衍射和透射电子衍射对晶体变形进行了评价。Fe_<0.7> /Au, Ni_<0.3>/Au呈现向表面法线方向的晶格变形。另一方面，为了在Au层下的Fe_<0.7>Ni_<0.3>薄膜上诱导进一步的晶格变形，研究了溅射Mo层的叠加。证实了Mo的内膜应力随工作氩气压力的变化而变化。当Mo/Fe_<0.7>Ni_<0.3>/Au叠层结构时，晶格变形发生在面内方向和表面法线方向。结果表明，在Fe_<0.7>Ni_<0.3>的薄膜中，Mo和/或Au层的叠加导致了不均匀的晶格变形。相应的原子磁矩随平均晶格参数的变化而变化。然而，这种变化的轨迹取决于晶格的变形。